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Load-lock frequency adjustment device SFE-B03-IIHandling Company
Sanko Ematech Co., Ltd.Image | Part Number | Price (excluding tax) | Adjustment system | Installation dimensions | Measuring instrument | Equipment weight | Device configuration | Production amount | Transport system | Exhaust pump | Circular adjustment process | Processing method | Number of processing | Manufacturer | Chamber (vacuum chamber) Processing chamber | Takt time | Ion source |
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SFE-B03-Ⅱ |
Available upon quote |
±1.5ppm or less |
W1,200mm×D1,300mm×H1,800mm |
Network analyzer/frequency counter 4 units (6 elements/1 unit) |
1,000kg |
2 rooms (preparation room, processing room) Interback type |
More than 10,000pcs/hour |
1 axis x direction only |
Oil rotary vacuum pump (RP) + turbo molecular pump (TMP) |
1~4 stairs (H,M,L,LL) |
Load lock type |
Maximum 24 columns (p4.0) x 32 columns |
Showa Vacuum Co., Ltd. |
W475mm×D500mm×H220mm |
0.4sec/pc or less |
100mm beam rectangular type 1 set → 24 beams (4mm pitch) |
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