Small evaporation equipment VTR-060M/ERH
Sanko Ematech Co., Ltd.
About This Product
■Product description
This is a small, low-cost resistance heating type vacuum evaporation device that compactly houses a turbomolecular pump and auxiliary pump inside the stand. Clean exhaust makes it ideal for experiments such as basic research and development.
■Features
It has a compact size that can be placed on a tabletop, and is equipped with a turbo molecular pump. High vacuum pumping is possible with just a switch operation, and it is highly expandable for multilayer film deposition and substrate rotation. Ideal for vapor deposition of low melting point metals. This product is ideal for experiments such as basic research and development, and because it has clean exhaust, it can also be used in clean rooms.
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Product
Small evaporation equipment VTR-060M/ERH
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Handling Company
Sanko Ematech Co., Ltd.
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Categories
1 Models of Small evaporation equipment VTR-060M/ERH
| Product Image | Part Number | Price (excluding tax) | Automatic leak valve | Auxiliary pump | Auxiliary valve | Evaporation electrode | Evaporation electrode configuration | Exhaust time | Feedthrough color | Film thickness meter | Main pump | Main valve | Manufacturer | Mass (kg) | Mass (kg) Power supply section | Maximum dimension (mm) | Maximum dimensions (mm) Power supply section | Oil mist trap | Operation | Recommended base size | Substrate/electrode distance | Ultimate pressure | Vacuum layer |
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VTR-060M/ERH |
Available upon quote | Option | Oil rotary vacuum pump 20L/min | Options (three-way valve) | SEREM PSE-150C・1 set 0-10V 80A (Max) | 1 point type | 4.0×10-3Pa/20min | 7 ports (bottom) | Options (CRTM-6000G) | Turbo molecular pump 60L/sec | Options (butterfly valve) | ULVAC Kiko Co., Ltd. | 50 | Twenty four | 428 (W) × 438 (L) × 713 (H) | 480 (W) × 435.3 (D) × 149 (H) | OMT-050A | Manual | □50mm ・ □120mm (Max) | Max 200mm | 10-4Pa | Cylindrical glass chamber (φ236mm x H250mm) |
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About Company Handling This Product
- Japan