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  3. Vacuum Vapor Deposition Devices
  4. Small evaporation equipment VTR-060M/ERH (Sanko Ematech Co., Ltd.)
Small evaporation equipment VTR-060M/ERH-VTR-060M/ERH
Small evaporation equipment VTR-060M/ERH-Sanko Ematech Co., Ltd.

Small evaporation equipment VTR-060M/ERH
Sanko Ematech Co., Ltd.

Sanko Ematech Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

42.2hours

Company Review

5.0

About This Product

■Product description

This is a small, low-cost resistance heating type vacuum evaporation device that compactly houses a turbomolecular pump and auxiliary pump inside the stand. Clean exhaust makes it ideal for experiments such as basic research and development.

■Features

It has a compact size that can be placed on a tabletop, and is equipped with a turbo molecular pump. High vacuum pumping is possible with just a switch operation, and it is highly expandable for multilayer film deposition and substrate rotation. Ideal for vapor deposition of low melting point metals. This product is ideal for experiments such as basic research and development, and because it has clean exhaust, it can also be used in clean rooms.

  • Product

    Small evaporation equipment VTR-060M/ERH

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1 Models of Small evaporation equipment VTR-060M/ERH

Image Part Number Price (excluding tax) Mass (kg) Power supply section Mass (kg) Auxiliary pump Auxiliary valve Evaporation electrode configuration Evaporation electrode Automatic leak valve Film thickness meter Vacuum layer Maximum dimensions (mm) Power supply section Maximum dimension (mm) Operation Exhaust time Recommended base size Substrate/electrode distance Ultimate pressure Manufacturer Main pump Main valve Feedthrough color Oil mist trap
Small evaporation equipment VTR-060M/ERH-Part Number-VTR-060M/ERH

VTR-060M/ERH

Available upon quote

Twenty four

50

Oil rotary vacuum pump 20L/min

Options (three-way valve)

1 point type

SEREM PSE-150C・1 set 0-10V 80A (Max)

Option

Options (CRTM-6000G)

Cylindrical glass chamber (φ236mm x H250mm)

480 (W) × 435.3 (D) × 149 (H)

428 (W) × 438 (L) × 713 (H)

Manual

4.0×10-3Pa/20min

□50mm ・ □120mm (Max)

Max 200mm

10-4Pa

ULVAC Kiko Co., Ltd.

Turbo molecular pump 60L/sec

Options (butterfly valve)

7 ports (bottom)

OMT-050A

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About Company Handling This Product

Sanko Ematech Co., Ltd.

Response Rate

100.0%

Response Time

42.2hrs

Company Review

5.0
  • Japan

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Vacuum Vapor Deposition Devices
Vacuum Vapor Deposition Devices　Sanko Ematech Co., Ltd.
Sanko Ematech Co., Ltd.

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