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  4. 3D white light interference microscope Contour GT-X (Sanko Ematech Co., Ltd.)

3D white light interference microscope Contour GT-X
Sanko Ematech Co., Ltd.

Sanko Ematech Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

42.2hours

Company Review

5.0

About This Product

■Features

・High-end model that supports automatic measurement of large substrates ・Electric functions (internal lens exchange, objective lens exchange, light intensity adjustment, focus adjustment, scan amount adjustment) ・300mm automatic XY stage (encoding control) ・Electric tilt adjustment head ・High measurement reproducibility achieved through closed-loop control ・Equipped with a measurement mode that matches the sample as standard ・Applicable to materials with different reflectance using two types of high-brightness LEDs - Necessary functions can be expanded from a wide range of options

■Options

・High-performance piezo scanner: resolution 0.01nmRMS repeatability 0.04nm ・Reference signal (real time): Self-calibration by internal laser

■Optional parts

Turret Compatible Objective Lens Standard Objective Lens: 2.5X, 5X, 10X, 20X, 50X, 115X, Optical Zoom Lens: 0.55X, 0.75X, 1.5X, 2X. Single compatible objective lens Objective lens adapter, low magnification interference objective lens: 1.5X, long working interference objective lens: 2XLWD, 5XLWD, 10XLWD, environmental compatible lens (TTM type) lens: 2XTTM, 5XTTM, 10XTTM, 20XTTM

■Equipment upgrade

A real color imaging system can be added. In addition to height information obtained through interferometric measurements, real color information is also acquired at the same time. The RealColor system exhibits excellent performance when measuring surfaces with different colors within the microscopic field of view.

  • Product

    3D white light interference microscope Contour GT-X

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1 Models of 3D white light interference microscope Contour GT-X

Image Part Number Price (excluding tax) Measurement method Step reproducibility Maximum measurement speed Maximum measurement range Vertical resolution Overwhelming height measurement dynamic range Various 3D measurements Control/analysis software Vision64 basic functions Tilt adjustment Light source used Manufacturer Z stage Z sample space XY stage sample CCD camera type

Contour GT-X

Available upon quote

USI method, VSI method, PSI method

<0.1%

114μm/sec

Max 10mm

<0.01mm

0.1nm~19mm

Surface shape (roughness), shape, step

Automatic adjustment (light intensity, range), 2D analysis, 3D analysis, multi-region analysis, autofocus, stitching, stage program, Vision64Map (high-performance offline control analysis software)

±6° electric mation head (computer control)

High brightness LED (white.green)

Bruker Japan Co., Ltd.

100mm electric

80mm

300mm×300mm electric (encoder control)

Standard monochrome 1200 x 1000 pixels, color (optional)

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About Company Handling This Product

Sanko Ematech Co., Ltd.

Response Rate

100.0%

Response Time

42.2hrs

Company Review

5.0
  • Japan

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DIC Microscopes
DIC Microscopes　Sanko Ematech Co., Ltd.
Sanko Ematech Co., Ltd.

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