3D white light interference microscope Contour GT-X
Sanko Ematech Co., Ltd.


About This Product

■Features ・High-end model that supports automatic measurement of large substrates ・Electric functions (internal lens exchange, objective lens exchange, light intensity adjustment, focus adjustment, scan amount adjustment) ・300mm automatic XY stage (encoding control) ・Electric tilt adjustment head ・High measurement reproducibility achieved through closed-loop control ・Equipped with a measurement mode that matches the sample as standard ・Applicable to materials with different reflectance using two types of high-brightness LEDs - Necessary functions can be expanded from a wide range of options ■Options ・High-performance piezo scanner: resolution 0.01nmRMS repeatability 0.04nm ・Reference signal (real time): Self-calibration by internal laser ■Optional parts Turret Compatible Objective Lens Standard Objective Lens: 2.5X, 5X, 10X, 20X, 50X, 115X, Optical Zoom Lens: 0.55X, 0.75X, 1.5X, 2X. Single compatible objective lens Objective lens adapter, low magnification interference objective lens: 1.5X, long working interference objective lens: 2XLWD, 5XLWD, 10XLWD, environmental compatible lens (TTM type) lens: 2XTTM, 5XTTM, 10XTTM, 20XTTM ■Equipment upgrade A real color imaging system can be added. In addition to height information obtained through interferometric measurements, real color information is also acquired at the same time. The RealColor system exhibits excellent performance when measuring surfaces with different colors within the microscopic field of view.

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    3D white light interference microscope Contour GT-X

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1 Models of 3D white light interference microscope Contour GT-X

Product Image Part Number Price (excluding tax) CCD camera type Control/analysis software Vision64 basic functions Light source used Manufacturer Maximum measurement range Maximum measurement speed Measurement method Overwhelming height measurement dynamic range Step reproducibility Tilt adjustment Various 3D measurements Vertical resolution XY stage sample Z sample space Z stage

Contour GT-X

Available upon quote Standard monochrome 1200 x 1000 pixels, color (optional) Automatic adjustment (light intensity, range), 2D analysis, 3D analysis, multi-region analysis, autofocus, stitching, stage program, Vision64Map (high-performance offline control analysis software) High brightness LED (white.green) Bruker Japan Co., Ltd. Max 10mm 114μm/sec USI method, VSI method, PSI method 0.1nm~19mm <0.1% ±6° electric mation head (computer control) Surface shape (roughness), shape, step <0.01mm 300mm×300mm electric (encoder control) 80mm 100mm electric

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