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  4. 3D white light interference microscope NPFLEX (Sanko Ematech Co., Ltd.)

3D white light interference microscope NPFLEX
Sanko Ematech Co., Ltd.

Sanko Ematech Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

42.2hours

Company Review

5.0

About This Product

■Features

・Highly flexible model that enables measurement of large and heavy objects ・High measurement reproducibility achieved through closed-loop control ・Equipped with a measurement mode that matches the sample as standard ・Applicable to materials with different reflectance using two types of high-brightness LEDs - Necessary functions can be expanded from a wide range of options ・300mm automatic XY stage (encoding control) ・Electric tilt adjustment head

■Options

・Swivel head (head inclination adjustment 45°) ・Side wall measurement lens (bore scope, wall angle holder) ・Various automatic rotation stages ・Long working objective lens

■Optional parts

Single compatible objective lens: Ultra-long working lens (integrated objective lens adapter): 2.0X, 5.0X, 10.0X, objective lens adapter, low magnification interference objective lens: 1.5X, long working interference objective lens: 2XLWD, 5XLWD, 10XLWD. Upgrade tool Stage: 360° rotation stage, spacer: 150mm, gantry column: electric gantry Z stage, 90° swivel gantry

■Equipment upgrade

A real color imaging system can be added. In addition to height information obtained through interferometric measurements, real color information is also acquired at the same time. The RealColor system exhibits excellent performance when measuring surfaces with different colors within the microscopic field of view.

  • Product

    3D white light interference microscope NPFLEX

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1 Models of 3D white light interference microscope NPFLEX

Image Part Number Price (excluding tax) Measurement method Step reproducibility Maximum loading sample weight Maximum measurement speed Maximum measurement range Maximum loadable sample size (W×D×H) Vertical resolution Overwhelming height measurement dynamic range Various 3D measurements Control/analysis software: Vision64 basic functions Tilt adjustment Light source used Manufacturer Z stage Z sample space XY stage sample CCD camera type

NPFLEX

Available upon quote

USI method, VSI method, PSI method

<0.1%

50kg

73μm/sec

Max 10mm

304mm×304mm×249mm

<0.01mm

0.1nm~19mm

Surface shape (roughness), shape, step

Automatic adjustment (light intensity, range), 2D analysis, 3D analysis, multi-region analysis, autofocus, stitching, stage program, Vision64Map (high-performance offline control analysis software)

±6° electric mation head (computer control)

High brightness LED (white.green)

Bruker Japan Co., Ltd.

200mm electric

249mm electric (on XY stage), 350mm electric (when XY stage is removed)

300mm×300mm electric (encoder control)

Standard monochrome 1,200 x 1,000 pixels, color (optional)

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About Company Handling This Product

Sanko Ematech Co., Ltd.

Response Rate

100.0%

Response Time

42.2hrs

Company Review

5.0
  • Japan

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