3D white light interference microscope NPFLEX
Sanko Ematech Co., Ltd.


About This Product

■Features ・Highly flexible model that enables measurement of large and heavy objects ・High measurement reproducibility achieved through closed-loop control ・Equipped with a measurement mode that matches the sample as standard ・Applicable to materials with different reflectance using two types of high-brightness LEDs - Necessary functions can be expanded from a wide range of options ・300mm automatic XY stage (encoding control) ・Electric tilt adjustment head ■Options ・Swivel head (head inclination adjustment 45°) ・Side wall measurement lens (bore scope, wall angle holder) ・Various automatic rotation stages ・Long working objective lens ■Optional parts Single compatible objective lens: Ultra-long working lens (integrated objective lens adapter): 2.0X, 5.0X, 10.0X, objective lens adapter, low magnification interference objective lens: 1.5X, long working interference objective lens: 2XLWD, 5XLWD, 10XLWD. Upgrade tool Stage: 360° rotation stage, spacer: 150mm, gantry column: electric gantry Z stage, 90° swivel gantry ■Equipment upgrade A real color imaging system can be added. In addition to height information obtained through interferometric measurements, real color information is also acquired at the same time. The RealColor system exhibits excellent performance when measuring surfaces with different colors within the microscopic field of view.

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    3D white light interference microscope NPFLEX

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1 Models of 3D white light interference microscope NPFLEX

Product Image Part Number Price (excluding tax) CCD camera type Control/analysis software: Vision64 basic functions Light source used Manufacturer Maximum loadable sample size (W×D×H) Maximum loading sample weight Maximum measurement range Maximum measurement speed Measurement method Overwhelming height measurement dynamic range Step reproducibility Tilt adjustment Various 3D measurements Vertical resolution XY stage sample Z sample space Z stage

NPFLEX

Available upon quote Standard monochrome 1,200 x 1,000 pixels, color (optional) Automatic adjustment (light intensity, range), 2D analysis, 3D analysis, multi-region analysis, autofocus, stitching, stage program, Vision64Map (high-performance offline control analysis software) High brightness LED (white.green) Bruker Japan Co., Ltd. 304mm×304mm×249mm 50kg Max 10mm 73μm/sec USI method, VSI method, PSI method 0.1nm~19mm <0.1% ±6° electric mation head (computer control) Surface shape (roughness), shape, step <0.01mm 300mm×300mm electric (encoder control) 249mm electric (on XY stage), 350mm electric (when XY stage is removed) 200mm electric

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