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  2. High performance stylus profiling system DektakXT (Sanko Ematech Co., Ltd.)
High performance stylus profiling system DektakXT-DektakXT-E
High performance stylus profiling system DektakXT-Sanko Ematech Co., Ltd.

High performance stylus profiling system DektakXT
Sanko Ematech Co., Ltd.

About This Product

■Features

・3D measurement speed is more than twice that of conventional systems ・Adopts a glass block gauge that achieves high straightness. ・Single arch design for high rigidity ・Uses smart electronics to suppress electrical noise ・Achieve measurement of 1nm to 1mm in the Z direction with the same head ・User interface that allows intuitive operation: Vision64 ・Manual or electric set available - Necessary functions can be expanded from a wide range of options

■Optional parts

・Sample chuck: Chuck lineup compatible with various samples, 2-3 inch wafer chuck, 4-6 inch wafer chuck, 8 inch wafer chuck, 2 inch porous chuck, 6 inch porous chuck ・Low contact force option Contact force: 0.03mg~: Recommended when measuring soft materials or using an ultra-fine stylus ・Stylus: Compatible with a wide range of stylus specifications depending on the measurement target. Radius of curvature: 2um, 2.5um, 5um, 10um, 12.5um, 25um, 0.2um, 0.7um ・Standard step gauge: Easy system calibration by the customer. Standard sample with calibration certificate: step difference 88nm, 450nm, 940nm, 8um Standard sample with calibration certificate (recalibration possible): step difference 88nm, 180nm, 450nm, 940nm ・Vibration isolation table: Manual leveling tabletop vibration isolation table, automatic leveling tabletop vibration isolation table, desk type vibration isolation table, compressor, vacuum pump

■Equipment upgrade

It is possible to upgrade to a model compatible with large stages while maintaining the same performance. It is also possible to combine it with a handler for fully automatic measurement. This system is not limited to R&D, but also supports a wide range of process management.

■Automatic stage

XY stage 12×12inch encoder control, 360° rotation

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    High performance stylus profiling system DektakXT

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3 Models of High performance stylus profiling system DektakXT

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Sample stage Sample size Tactile pressure range Step reproducibility Control analysis software Vision64 basic functions Manufacturer Z direction resolution
High performance stylus profiling system DektakXT-Part Number-DektakXT-E

DektakXT-E

Available upon quote

XY manual 4inch

Maximum 4inch

1mg~15mg

0.4nm (1σ after 30 consecutive measurements)

Roughness analysis, stress calculation, bearing ratio analysis, histogram analysis, automatic step value calculation

Bruker Japan Co., Ltd.

0.1nm

High performance stylus profiling system DektakXT-Part Number-DektakXT-S

DektakXT-S

Available upon quote

XY manual 4inch 360° rotation

Maximum 8inch

1mg~15mg

0.4nm (1σ after 30 consecutive measurements)

Roughness analysis, stress calculation, bearing ratio analysis, histogram analysis, automatic step value calculation

Bruker Japan Co., Ltd.

0.1nm

High performance stylus profiling system DektakXT-Part Number-DektakXT-A

DektakXT-A

Available upon quote

XY manual 4inch 360° rotation

Maximum 8inch

1mg~15mg

0.4nm (1σ after 30 consecutive measurements)

Roughness analysis, stress calculation, bearing ratio analysis, histogram analysis, automatic step value calculation, multi-region analysis, measurement area ratio calculation, volume variation graph, autocorrelation analysis, X/Y direction differential analysis

Bruker Japan Co., Ltd.

0.1nm

Click on the part number for more information about each product

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Sanko Ematech Co., Ltd.

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