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Vacuum Gauge Ceramic Capacitance Manometer CCMT-D Series-CCMT-1000D
Vacuum Gauge Ceramic Capacitance Manometer CCMT-D Series-Sanko Ematech Co., Ltd.

Vacuum Gauge Ceramic Capacitance Manometer CCMT-D Series
Sanko Ematech Co., Ltd.

Sanko Ematech Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

38.3hours


About This Product

■Product description

A vacuum gauge whose diaphragm made of ceramic (alumina) deforms due to changes in gas pressure and detects pressure from the capacitance that changes accordingly. The sensor part has an integrated structure made of ceramic and has excellent reproducibility and stability, and can accurately measure pressure in low and medium vacuum regions regardless of the type of gas (absolute pressure gauge).

■Applications

・Pressure monitor during the process of film deposition equipment ・Pressure monitor for vacuum evacuation systems such as vacuum melting and vacuum heat treatment furnaces ・Pressure monitor for various manufacturing equipment such as solar cells ・Pressure monitor for gas replacement, gas filling, etc. ・Pressure vacuum systems such as pressure reduction furnaces Features ・Long-term stability ・Excellent corrosion resistance due to the use of ceramic membrane ・Built-in temperature compensation circuit type ・Newly adopted structure that protects the sensor from dirt ・0 point adjustment possible with push button

  • Product

    Vacuum Gauge Ceramic Capacitance Manometer CCMT-D Series

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4 Models of Vacuum Gauge Ceramic Capacitance Manometer CCMT-D Series

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Mass Accuracy Measurement lower limit pressure Measurement full scale Temperature compensation Temperature coefficient Zero voltage Temperature coefficient Span voltage Gas contact material Response speed Practical measurement lower limit pressure External dimensions Resolution Output Input power Input/output connector Operating temperature range Manufacturer Fitting
Vacuum Gauge Ceramic Capacitance Manometer CCMT-D Series-Part Number-CCMT-1000D

CCMT-1000D

Available upon quote

329g (diameter 12.7/standard type)

±0.2% of indicated value ±temperature coefficient

13Pa

133kPa F.S.

Built-in temperature compensation circuit

0.015% F.S./℃

0.01% R/℃

Al2O3, Vacon70 *2, SUS316 *3, glass solder, AgTiCu hard solder

30ms or less

66.6Pa

Diameter 55mm x 117mm (diameter 12.7mm, standard type)

0.003% for full case

DC 0~10VF.S

DC14~30V, 1W

D-sub 15 pin male

10~50℃

ULVAC Co., Ltd.

Diameter 12.7 pipe, NW16, Cajon 8VCR

Vacuum Gauge Ceramic Capacitance Manometer CCMT-D Series-Part Number-CCMT-100D

CCMT-100D

Available upon quote

329g (diameter 12.7/standard type)

±0.2% of indicated value ±temperature coefficient

1.3Pa

13.3kPa F.S.

Built-in temperature compensation circuit

0.015% F.S./℃

0.01% R/℃

Al2O3, Vacon70 *2, SUS316 *3, glass solder, AgTiCu hard solder

30ms or less

6.7Pa

Diameter 55mm x 117mm (diameter 12.7mm, standard type)

0.003% for full case

DC 0~10VF.S

DC14~30V, 1W

D-sub 15 pin male

10~50℃

ULVAC Co., Ltd.

Diameter 12.7 pipe, NW16, Cajon 8VCR

Vacuum Gauge Ceramic Capacitance Manometer CCMT-D Series-Part Number-CCMT-10D

CCMT-10D

Available upon quote

329g (diameter 12.7/standard type)

±0.2% of indicated value ±temperature coefficient

0.13Pa

1.33kPa F.S.

Built-in temperature compensation circuit

0.015% F.S./℃

0.01% R/℃

Al2O3, Vacon70 *2, SUS316 *3, glass solder, AgTiCu hard solder

30ms or less

0.67Pa

Diameter 55mm x 117mm (diameter 12.7mm, standard type)

0.003% for full case

DC 0~10VF.S

DC14~30V, 1W

D-sub 15 pin male

10~50℃

ULVAC Co., Ltd.

Diameter 12.7 pipe, NW16, Cajon 8VCR

Vacuum Gauge Ceramic Capacitance Manometer CCMT-D Series-Part Number-CCMT-1D

CCMT-1D

Available upon quote

329g (diameter 12.7/standard type)

±0.2% of indicated value ±temperature coefficient

1.3×10-2Pa

133Pa F.S.

Built-in temperature compensation circuit

0.015% F.S./℃

0.01% R/℃

Al2O3, Vacon70 *2, SUS316 *3, glass solder, AgTiCu hard solder

30ms or less

6.7×10-2Pa

Diameter 55mm x 117mm (diameter 12.7mm, standard type)

0.003% for full case

DC 0~10VF.S

DC14~30V, 1W

D-sub 15 pin male

10~50℃

ULVAC Co., Ltd.

Diameter 12.7 pipe, NW16, Cajon 8VCR

Click on the part number for more information about each product

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About Company Handling This Product

Response Rate

100.0%


Response Time

38.3hrs


Company Review

5.0
  • Japan

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