Vacuum Gauge Ceramic Capacitance Manometer CCMT-D Series
Sanko Ematech Co., Ltd.
About This Product
■Product description
A vacuum gauge whose diaphragm made of ceramic (alumina) deforms due to changes in gas pressure and detects pressure from the capacitance that changes accordingly. The sensor part has an integrated structure made of ceramic and has excellent reproducibility and stability, and can accurately measure pressure in low and medium vacuum regions regardless of the type of gas (absolute pressure gauge).
■Applications
・Pressure monitor during the process of film deposition equipment
・Pressure monitor for vacuum evacuation systems such as vacuum melting and vacuum heat treatment furnaces
・Pressure monitor for various manufacturing equipment such as solar cells
・Pressure monitor for gas replacement, gas filling, etc.
・Pressure vacuum systems such as pressure reduction furnaces
Features
・Long-term stability
・Excellent corrosion resistance due to the use of ceramic membrane
・Built-in temperature compensation circuit type
・Newly adopted structure that protects the sensor from dirt
・0 point adjustment possible with push button
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Product
Vacuum Gauge Ceramic Capacitance Manometer CCMT-D Series
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Handling Company
Sanko Ematech Co., Ltd.
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Categories
4 Models of Vacuum Gauge Ceramic Capacitance Manometer CCMT-D Series
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | Accuracy | External dimensions | Fitting | Gas contact material | Input power | Input/output connector | Manufacturer | Mass | Measurement full scale | Measurement lower limit pressure | Operating temperature range | Output | Practical measurement lower limit pressure | Resolution | Response speed | Temperature coefficient Span voltage | Temperature coefficient Zero voltage | Temperature compensation |
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CCMT-1000D |
Available upon quote | ±0.2% of indicated value ±temperature coefficient | Diameter 55mm x 117mm (diameter 12.7mm, standard type) | Diameter 12.7 pipe, NW16, Cajon 8VCR | Al2O3, Vacon70 *2, SUS316 *3, glass solder, AgTiCu hard solder | DC14~30V, 1W | D-sub 15 pin male | ULVAC Co., Ltd. | 329g (diameter 12.7/standard type) | 133kPa F.S. | 13Pa | 10~50℃ | DC 0~10VF.S | 66.6Pa | 0.003% for full case | 30ms or less | 0.01% R/℃ | 0.015% F.S./℃ | Built-in temperature compensation circuit |
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CCMT-100D |
Available upon quote | ±0.2% of indicated value ±temperature coefficient | Diameter 55mm x 117mm (diameter 12.7mm, standard type) | Diameter 12.7 pipe, NW16, Cajon 8VCR | Al2O3, Vacon70 *2, SUS316 *3, glass solder, AgTiCu hard solder | DC14~30V, 1W | D-sub 15 pin male | ULVAC Co., Ltd. | 329g (diameter 12.7/standard type) | 13.3kPa F.S. | 1.3Pa | 10~50℃ | DC 0~10VF.S | 6.7Pa | 0.003% for full case | 30ms or less | 0.01% R/℃ | 0.015% F.S./℃ | Built-in temperature compensation circuit |
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CCMT-10D |
Available upon quote | ±0.2% of indicated value ±temperature coefficient | Diameter 55mm x 117mm (diameter 12.7mm, standard type) | Diameter 12.7 pipe, NW16, Cajon 8VCR | Al2O3, Vacon70 *2, SUS316 *3, glass solder, AgTiCu hard solder | DC14~30V, 1W | D-sub 15 pin male | ULVAC Co., Ltd. | 329g (diameter 12.7/standard type) | 1.33kPa F.S. | 0.13Pa | 10~50℃ | DC 0~10VF.S | 0.67Pa | 0.003% for full case | 30ms or less | 0.01% R/℃ | 0.015% F.S./℃ | Built-in temperature compensation circuit |
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CCMT-1D |
Available upon quote | ±0.2% of indicated value ±temperature coefficient | Diameter 55mm x 117mm (diameter 12.7mm, standard type) | Diameter 12.7 pipe, NW16, Cajon 8VCR | Al2O3, Vacon70 *2, SUS316 *3, glass solder, AgTiCu hard solder | DC14~30V, 1W | D-sub 15 pin male | ULVAC Co., Ltd. | 329g (diameter 12.7/standard type) | 133Pa F.S. | 1.3×10-2Pa | 10~50℃ | DC 0~10VF.S | 6.7×10-2Pa | 0.003% for full case | 30ms or less | 0.01% R/℃ | 0.015% F.S./℃ | Built-in temperature compensation circuit |
Click on the part number for more information about each product
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About Company Handling This Product
- Japan