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Component power supply DC power supply DC-D series-DC-10-D
Component power supply DC power supply DC-D series-Sanko Ematech Co., Ltd.

Component power supply DC power supply DC-D series
Sanko Ematech Co., Ltd.

Sanko Ematech Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

38.3hours


About This Product

■Product description

DC-10-D has an output of 10kW and DC-20-D has an output of 20kW. This is to ensure the power required for the sputtering process and provides flexibility to adapt to different process conditions. The product is constructed with reliable components and circuits, and the entire product is designed to be highly reliable. This is a stable element in industrial applications and is important for process consistency. It is said that many years of know-how regarding power supply applications is reflected in the design. This suggests that the knowledge accumulated by product developers to respond to real-world usage situations and market needs is incorporated into the product.

■Applications

FPD sputtering equipment is used to manufacture flat displays such as liquid crystal displays and organic EL displays. Semiconductor sputtering equipment is used to deposit metal thin films in the manufacturing process of semiconductor devices. Sputtering equipment for electronic components is used to manufacture electronic components such as resistors and capacitors. Industrial coating sputtering equipment is used to apply coatings to the surfaces of industrial products, mechanical parts, etc.

■Features

・Lighter‧Space saving ・Output control with familiarity with plasma ・Output voltage is 800V specification and 1,000V specification ・Forced air cooling method, no cooling water required ・Equipped with ARC function and high-speed ARC cutoff circuit ・Parallel operation is possible for up to 12 units (240kW)

■Optional features

1. High Performance RAMP A function that controls the output (ignition operation) before discharge and suppresses sudden changes in output at the start of discharge. Normally, the output is controlled after discharge, but this function controls the output before discharge to suppress a sudden rise in power at the start of discharge and stabilize the discharge. 2. High Speed ​​ARC Handling A feature that achieves high precision output for settings and has accurate continuous repeatability. The guaranteed value range is not the usual 10% to 100%, but the guaranteed value range starts from 1% for devices with this package added. There is little variation in output, and high reproducibility is maintained even in processes that are repeated thousands or tens of thousands of times.

  • Product

    Component power supply DC power supply DC-D series

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4 Models of Component power supply DC power supply DC-D series

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Power control accuracy 1 to less than 10% of rated power Power control accuracy: 10% or more of rated power Power control warranty range Compatible standards Operating environment Applicable standards Operating ambient temperature Compatible standards Mass Number of phases, frequency Maximum rated power Rated current Rated voltage External control External dimensions Variation range Control method Output connection Cooling method Input voltage Input connection Input capacity Parallel operation Manufacturer ARC control
Component power supply DC power supply DC-D series-Part Number-DC-10-D

DC-10-D

Available upon quote

±5% or less of set value

Less than ±0.5% of rating or less than ±1% of setting value, whichever is greater

10-100% of rated power (option: 1-100%)

Avoid direct sunlight, heat, dust, and vibration. Do not contain corrosive gases.

Operating ambient temperature 5℃~40℃ (no condensation)

RoHS, CE (EN61000-6-2, EN61000-6-4, EN61010-1), SEMI F47

29kg

3 phase 50/60Hz

10kW

25A

800V

Analog/Digital, RS-232C, RS-485/EtherCAT *4

Within 483mm (W) x 630mm (D) x 133mm (H) *Does not include protrusions

AC187V~229V

Constant power control (P control) / Constant current control (I control) / Constant voltage control (V control)

Connector

Forced air cooling

AC208V

Connector

13.5kVA or less 25kVA or less

Up to 12 units

ULVAC Co., Ltd.

Low ARC circuit operation and Inverter stop when ARC is detected

Component power supply DC power supply DC-D series-Part Number-DC-10-DH

DC-10-DH

Available upon quote

±5% or less of set value

Less than ±0.5% of rating or less than ±1% of setting value, whichever is greater

10-100% of rated power (option: 1-100%)

Avoid direct sunlight, heat, dust, and vibration. Do not contain corrosive gases.

Operating ambient temperature 5℃~40℃ (no condensation)

RoHS, CE (EN61000-6-2, EN61000-6-4, EN61010-1), SEMI F4

29kg

3 phase 50/60Hz

10kW

18A

1,000V

Analog/Digital, RS-232C, RS-485/EtherCAT *4

Within 483mm (W) x 630mm (D) x 133mm (H) *Does not include protrusions

AC187V~229V

Constant power control (P control) / Constant current control (I control) / Constant voltage control (V control)

Connector

Forced air cooling

AC208V

Connector

13.5kVA or less 25kVA or less

Up to 12 units

ULVAC Co., Ltd.

Low ARC circuit operation and Inverter stop when ARC is detected

Component power supply DC power supply DC-D series-Part Number-DC-20-D

DC-20-D

Available upon quote

±5% or less of set value

Less than ±0.5% of rating or less than ±1% of setting value, whichever is greater

10-100% of rated power (option: 1-100%)

Avoid direct sunlight, heat, dust, and vibration. Do not contain corrosive gases.

Operating ambient temperature 5℃~40℃ (no condensation)

RoHS, CE (EN61000-6-2, EN61000-6-4, EN61010-1), SEMI F47

36kg

3 phase 50/60Hz

10kW

50A

800V

Analog/Digital, RS-232C, RS-485/EtherCAT *4

Within 483mm (W) x 630mm (D) x 133mm (H) *Does not include protrusions

AC187V~229V

Constant power control (P control) / Constant current control (I control) / Constant voltage control (V control)

Connector

Forced air cooling

AC208V

Connector

13.5kVA or less 25kVA or less

Up to 12 units

ULVAC Co., Ltd.

Low ARC circuit operation and Inverter stop when ARC is detected

Component power supply DC power supply DC-D series-Part Number-DC-20-DH

DC-20-DH

Available upon quote

±5% or less of set value

Less than ±0.5% of rating or less than ±1% of setting value, whichever is greater

10-100% of rated power (option: 1-100%)

Avoid direct sunlight, heat, dust, and vibration. Do not contain corrosive gases.

Operating ambient temperature 5℃~40℃ (no condensation)

RoHS, CE (EN61000-6-2, EN61000-6-4, EN61010-1), SEMI F47

36kg

3 phase 50/60Hz

10kW

40A

1,000V

Analog/Digital, RS-232C, RS-485/EtherCAT *4

Within 483mm (W) x 630mm (D) x 133mm (H) *Does not include protrusions

AC187V~229V

Constant power control (P control) / Constant current control (I control) / Constant voltage control (V control)

Connector

Forced air cooling

AC208V

Connector

13.5kVA or less 25kVA or less

Up to 12 units

ULVAC Co., Ltd.

Low ARC circuit operation and Inverter stop when ARC is detected

Click on the part number for more information about each product

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About Company Handling This Product

Response Rate

100.0%


Response Time

38.3hrs


Company Review

5.0
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