Component power supply DC power supply DC-D series
Sanko Ematech Co., Ltd.
About This Product
■Product description
DC-10-D has an output of 10kW and DC-20-D has an output of 20kW. This is to ensure the power required for the sputtering process and provides flexibility to adapt to different process conditions. The product is constructed with reliable components and circuits, and the entire product is designed to be highly reliable.
This is a stable element in industrial applications and is important for process consistency. It is said that many years of know-how regarding power supply applications is reflected in the design. This suggests that the knowledge accumulated by product developers to respond to real-world usage situations and market needs is incorporated into the product.
■Applications
FPD sputtering equipment is used to manufacture flat displays such as liquid crystal displays and organic EL displays. Semiconductor sputtering equipment is used to deposit metal thin films in the manufacturing process of semiconductor devices. Sputtering equipment for electronic components is used to manufacture electronic components such as resistors and capacitors.
Industrial coating sputtering equipment is used to apply coatings to the surfaces of industrial products, mechanical parts, etc.
■Features
・Lighter‧Space saving
・Output control with familiarity with plasma
・Output voltage is 800V specification and 1,000V specification
・Forced air cooling method, no cooling water required
・Equipped with ARC function and high-speed ARC cutoff circuit
・Parallel operation is possible for up to 12 units (240kW)
■Optional features
1. High Performance RAMP A function that controls the output (ignition operation) before discharge and suppresses sudden changes in output at the start of discharge. Normally, the output is controlled after discharge, but this function controls the output before discharge to suppress a sudden rise in power at the start of discharge and stabilize the discharge.
2. High Speed ARC Handling A feature that achieves high precision output for settings and has accurate continuous repeatability. The guaranteed value range is not the usual 10% to 100%, but the guaranteed value range starts from 1% for devices with this package added. There is little variation in output, and high reproducibility is maintained even in processes that are repeated thousands or tens of thousands of times.
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Product
Component power supply DC power supply DC-D series
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Handling Company
Sanko Ematech Co., Ltd.
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Categories
4 Models of Component power supply DC power supply DC-D series
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | ARC control | Applicable standards Operating ambient temperature | Compatible standards | Compatible standards Operating environment | Control method | Cooling method | External control | External dimensions | Input capacity | Input connection | Input voltage | Manufacturer | Mass | Maximum rated power | Number of phases, frequency | Output connection | Parallel operation | Power control accuracy 1 to less than 10% of rated power | Power control accuracy: 10% or more of rated power | Power control warranty range | Rated current | Rated voltage | Variation range |
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DC-10-D |
Available upon quote | Low ARC circuit operation and Inverter stop when ARC is detected | Operating ambient temperature 5℃~40℃ (no condensation) | RoHS, CE (EN61000-6-2, EN61000-6-4, EN61010-1), SEMI F47 | Avoid direct sunlight, heat, dust, and vibration. Do not contain corrosive gases. | Constant power control (P control) / Constant current control (I control) / Constant voltage control (V control) | Forced air cooling | Analog/Digital, RS-232C, RS-485/EtherCAT *4 | Within 483mm (W) x 630mm (D) x 133mm (H) *Does not include protrusions | 13.5kVA or less 25kVA or less | Connector | AC208V | ULVAC Co., Ltd. | 29kg | 10kW | 3 phase 50/60Hz | Connector | Up to 12 units | ±5% or less of set value | Less than ±0.5% of rating or less than ±1% of setting value, whichever is greater | 10-100% of rated power (option: 1-100%) | 25A | 800V | AC187V~229V |
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DC-10-DH |
Available upon quote | Low ARC circuit operation and Inverter stop when ARC is detected | Operating ambient temperature 5℃~40℃ (no condensation) | RoHS, CE (EN61000-6-2, EN61000-6-4, EN61010-1), SEMI F4 | Avoid direct sunlight, heat, dust, and vibration. Do not contain corrosive gases. | Constant power control (P control) / Constant current control (I control) / Constant voltage control (V control) | Forced air cooling | Analog/Digital, RS-232C, RS-485/EtherCAT *4 | Within 483mm (W) x 630mm (D) x 133mm (H) *Does not include protrusions | 13.5kVA or less 25kVA or less | Connector | AC208V | ULVAC Co., Ltd. | 29kg | 10kW | 3 phase 50/60Hz | Connector | Up to 12 units | ±5% or less of set value | Less than ±0.5% of rating or less than ±1% of setting value, whichever is greater | 10-100% of rated power (option: 1-100%) | 18A | 1,000V | AC187V~229V |
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DC-20-D |
Available upon quote | Low ARC circuit operation and Inverter stop when ARC is detected | Operating ambient temperature 5℃~40℃ (no condensation) | RoHS, CE (EN61000-6-2, EN61000-6-4, EN61010-1), SEMI F47 | Avoid direct sunlight, heat, dust, and vibration. Do not contain corrosive gases. | Constant power control (P control) / Constant current control (I control) / Constant voltage control (V control) | Forced air cooling | Analog/Digital, RS-232C, RS-485/EtherCAT *4 | Within 483mm (W) x 630mm (D) x 133mm (H) *Does not include protrusions | 13.5kVA or less 25kVA or less | Connector | AC208V | ULVAC Co., Ltd. | 36kg | 10kW | 3 phase 50/60Hz | Connector | Up to 12 units | ±5% or less of set value | Less than ±0.5% of rating or less than ±1% of setting value, whichever is greater | 10-100% of rated power (option: 1-100%) | 50A | 800V | AC187V~229V |
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DC-20-DH |
Available upon quote | Low ARC circuit operation and Inverter stop when ARC is detected | Operating ambient temperature 5℃~40℃ (no condensation) | RoHS, CE (EN61000-6-2, EN61000-6-4, EN61010-1), SEMI F47 | Avoid direct sunlight, heat, dust, and vibration. Do not contain corrosive gases. | Constant power control (P control) / Constant current control (I control) / Constant voltage control (V control) | Forced air cooling | Analog/Digital, RS-232C, RS-485/EtherCAT *4 | Within 483mm (W) x 630mm (D) x 133mm (H) *Does not include protrusions | 13.5kVA or less 25kVA or less | Connector | AC208V | ULVAC Co., Ltd. | 36kg | 10kW | 3 phase 50/60Hz | Connector | Up to 12 units | ±5% or less of set value | Less than ±0.5% of rating or less than ±1% of setting value, whichever is greater | 10-100% of rated power (option: 1-100%) | 40A | 1,000V | AC187V~229V |
Click on the part number for more information about each product
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About Company Handling This Product
- Japan