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Component power supply target switch EXN-A series
Sanko Ematech Co., Ltd.

Sanko Ematech Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

32.5hours

Relatively Fast Response


About This Product

■Product description

The EXN series is a device used as a target switcher and also includes power supply DC sputter electrodes and RF sputter electrodes for multiple different applications.

■Features

Matching box output can be switched: The EXN series can switch the matching box output. This is useful when you need to provide different power to different targets or applications.

■No need to install a matching box for each cathode

Normally, separate matching boxes must be installed for different cathodes (targets), but with the EXN series, these separate installations are no longer necessary, reducing equipment costs.

■Switching method

The EXN series offers 0 switching methods: manual and motor driven. This increases the flexibility of operation and allows selection to suit the user's requirements. Additionally, water-cooled systems that support higher power are also available. Output switching of DC power supply and DC pulse power supply: The EXN series can also be used to switch the output of DC power supply and DC pulse power supply. This is useful if different power sources are required. One matching box: Usually different matching boxes are needed for different loads, but with the EXN series, one matching box can serve multiple applications. However, please note that it cannot be used for loads that exceed the matching range. This device is used to efficiently switch the power supply to different electrodes and power sources, contributing to lower device costs and simpler operation.

  • Product

    Component power supply target switch EXN-A series

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6 Models of Component power supply target switch EXN-A series

Click on the part number for more information about each product

Image Part Number Price (excluding tax) High frequency connection terminal Installation location humidity Installation location temperature Between contacts 50Hz Contact position output Between contact and GND 60Hz Between contact and GND 50Hz Contact 60Hz Rated current Switching method Switching contact Cooling method Frequency used Motor rated current Motor rated voltage Manufacturer Hot switch

EXN2T-40A

Available upon quote

O4mm bolted

30%~80% (no condensation)

5℃~35℃

AC 10kV for 1 minute

Micro switch (contact capacity 0.25A 24VDC)

AC 10kV for 1 minute

AC 10kV for 1 minute

AC 10kV for 1 minute

40A

Manual type

2 points

Natural wind cooling (cooling method that does not use a fan)

DC-13.56MHz

0.22A (max. 0.75A)

DC24V

ULVAC Co., Ltd.

Hot switch not available

EXN3T-40A

Available upon quote

O4mm bolted

30%~80% (no condensation)

5℃~35℃

AC 10kV for 1 minute

Micro switch (contact capacity 0.25A 24VDC)

AC 10kV for 1 minute

AC 10kV for 1 minute

AC 10kV for 1 minute

40A

Manual type

3 points

Natural wind cooling (cooling method that does not use a fan)

DC-13.56MHz

0.22A (max. 0.75A)

DC24V

ULVAC Co., Ltd.

Hot switch not available

EXN4T-40A

Available upon quote

O4mm bolted

30%~80% (no condensation)

5℃~35℃

AC 10kV for 1 minute

Micro switch (contact capacity 0.25A 24VDC)

AC 10kV for 1 minute

AC 10kV for 1 minute

AC 10kV for 1 minute

40A

Manual type

4 points

Natural wind cooling (cooling method that does not use a fan)

DC-13.56MHz

0.22A (max. 0.75A)

DC24V

ULVAC Co., Ltd.

Hot switch not available

EXN2M-40A

Available upon quote

O4mm bolted

30%~80% (no condensation)

5℃~35℃

AC 10kV for 1 minute

Micro switch (contact capacity 0.25A 24VDC)

AC 10kV for 1 minute

AC 10kV for 1 minute

AC 10kV for 1 minute

40A

Electric

2 points (electric)

Natural wind cooling (cooling method that does not use a fan)

DC-13.56MHz

0.22A (max. 0.75A)

DC24V

ULVAC Co., Ltd.

Hot switch not available

EXN3M-40A

Available upon quote

O4mm bolted

30%~80% (no condensation)

5℃~35℃

AC 10kV for 1 minute

Micro switch (contact capacity 0.25A 24VDC)

AC 10kV for 1 minute

AC 10kV for 1 minute

AC 10kV for 1 minute

40A

Electric

3 points (electric)

Natural wind cooling (cooling method that does not use a fan)

DC-13.56MHz

0.22A (max. 0.75A)

DC24V

ULVAC Co., Ltd.

Hot switch not available

EXN4M-40A

Available upon quote

O4mm bolted

30%~80% (no condensation)

5℃~35℃

AC 10kV for 1 minute

Micro switch (contact capacity 0.25A 24VDC)

AC 10kV for 1 minute

AC 10kV for 1 minute

AC 10kV for 1 minute

40A

Electric

4 points (electric)

Natural wind cooling (cooling method that does not use a fan)

DC-13.56MHz

0.22A (max. 0.75A)

DC24V

ULVAC Co., Ltd.

Hot switch not available

Click on the part number for more information about each product

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About Company Handling This Product

Response Rate

100.0%


Response Time

32.5hrs


Company Review

5.0
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