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  4. Cryopump CRYO-UL series (Sanko Ematech Co., Ltd.)

Cryopump CRYO-UL series
Sanko Ematech Co., Ltd.

About This Product

■Features

Contributes to making the device more compact By installing the refrigerator unit from the side, the height dimension is minimized. (Models other than CTI products can be manufactured as L-type)

  • Product

    Cryopump CRYO-UL series

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3 Models of Cryopump CRYO-UL series

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Pumping speed (20℃) Nitrogen Intake flange Ultimate pressure Manufacturer Maintenance interval

CRYO-U8HL

Available upon quote

1,500L/s

UVG-200,6BANSI,UFC-253

10^-7 (10^-9)

ULVAC Cryo Co., Ltd.

16,000 hours

CRYO-U10HL

Available upon quote

2,400L/s

UVG-250,UFC306,UFC-305

10^-7 (10^-9)

ULVAC Cryo Co., Ltd.

16,000 hours

CRYO-U12HL

Available upon quote

4,000L/s

UVG-300,10BANSI

10^-7 (10^-9)

ULVAC Cryo Co., Ltd.

16,000 hours

Click on the part number for more information about each product

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Sanko Ematech Co., Ltd.

  • Japan

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