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Cryopump CRYO-SP series for sputtering processHandling Company
Sanko Ematech Co., Ltd.Categories
Click on the part number for more information about each product
| Image | Part Number | Price (excluding tax) | Pumping speed (20℃) Nitrogen | Intake flange | Ultimate pressure | Manufacturer | Maintenance interval |
|---|---|---|---|---|---|---|---|
CRYPO-U8HSP |
Available upon quote |
1,700L/s |
UVG-200,6BANSI,UFC-253 |
10^-7 (10^-9) Pa (Torr) |
ULVAC Cryo Co., Ltd. |
16,000 hours |
|
CRYPO-U10HSP |
Available upon quote |
2,400L/s |
UVG-250,10BANSI |
10^-7 (10^-9) Pa (Torr) |
ULVAC Cryo Co., Ltd. |
16,000 hours |
|
CRYPO-U12HSP |
Available upon quote |
4,100L/s |
UVG-300,10BANSI |
10^-7 (10^-9) Pa (Torr) |
ULVAC Cryo Co., Ltd. |
16,000 hours |
Click on the part number for more information about each product
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