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  4. Cryopump Speed ​​TS series (Sanko Ematech Co., Ltd.)
Cryopump Speed ​​TS series-TS10
Cryopump Speed ​​TS series-Sanko Ematech Co., Ltd.

Cryopump Speed ​​TS series
Sanko Ematech Co., Ltd.

Sanko Ematech Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

35.2hours

Company Review

5.0

About This Product

■Features

・Replacement for fluorocarbon-based cold traps ・Significantly shortens exhaust time and contributes to improved equipment availability. ・Since helium gas is used, global warming potential is 0. (CFC substitutes have a global warming potential of 1,600 to 3,800) ・Performance equivalent to or better than fluorocarbon-based cold traps. ・Cooling and heating are completed within 10 minutes each. ・Effective pumping speed: 10,000 to 100,000L/s. ・Lightweight, compact, and easy to install. (The installation space is approximately 1/3 that of a fluorocarbon cold trap) ・Ideal for batch-type equipment with high moisture content, optical film forming equipment, etc. (Can be used in all vacuum equipment)

  • Product

    Cryopump Speed ​​TS series

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3 Models of Cryopump Speed ​​TS series

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Applicable chamber Manufacturer Cryopanel size
Cryopump Speed ​​TS series-Part Number-TS10

TS10

Available upon quote

Φ600~800mm

ULVAC Cryo Co., Ltd.

200X200mm

Cryopump Speed ​​TS series-Part Number-TS14

TS14

Available upon quote

Φ600~1,000mm

ULVAC Cryo Co., Ltd.

250X250mm

Cryopump Speed ​​TS series-Part Number-TS22

TS22

Available upon quote

Φ1,100~1,300mm

ULVAC Cryo Co., Ltd.

400X400mm

Click on the part number for more information about each product

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About Company Handling This Product

Sanko Ematech Co., Ltd.

Response Rate

100.0%

Response Time

35.2hrs

Company Review

5.0
  • Japan

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