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  4. Cryopump CRYO-U series (Sanko Ematech Co., Ltd.)

Cryopump CRYO-U series
Sanko Ematech Co., Ltd.

About This Product

■Product description

Standard cryopumps available in various sizes (4" to 30" diameter). We have various options such as band heaters, cryo thermometers, and automatic regeneration devices.

■Features

・Provides a clean vacuum that cannot be obtained with other pumps. ・All expectations can be exhausted. ・Since liquid nitrogen is not required, it can be used at low running costs. -Can be installed in any direction. - Compact design and lightweight. -Easy to operate. ・Higher pumping speed can be obtained compared to ion pumps and turbomolecular pumps.

■Applications

・Vacuum deposition equipment ・Sputtering equipment ・Ion implantation equipment ・Semiconductor process equipment ・Accelerator ・Nuclear fusion device ・Surface analysis device ・Space chamber ・Other equipment that requires clean high vacuum or ultra-high vacuum *Other model numbers are available.

  • Product

    Cryopump CRYO-U series

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10 Models of Cryopump CRYO-U series

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Pumping speed (20℃) Intake flange Ultimate pressure Manufacturer Maintenance interval

CRYO-U4H

Available upon quote

Nitrogen 450L/s

ISO-K DN100

10^-7 (10^-9) Pa (Torr)

ULVAC Cryo Co., Ltd.

16,000 hours

CRYO-U6H

Available upon quote

Nitrogen 750L/s

UVG-150, UFC-203

10^-7 (10^-9) Pa (Torr)

ULVAC Cryo Co., Ltd.

16,000 hours

CRYO-U8H

Available upon quote

Nitrogen 1,700L/s

UVG-200, 6BANSI, UFC-253

10^-7 (10^-9) Pa (Torr)

ULVAC Cryo Co., Ltd.

16,000 hours

CRYO-U10H

Available upon quote

Nitrogen 2,400L/s

UVG-250

10^-7 (10^-9) Pa (Torr)

ULVAC Cryo Co., Ltd.

16,000 hours

CRYO-U12H

Available upon quote

Nitrogen 4,000L/s

UVG-300, 10BANSI

10^-7 (10^-9) Pa (Torr)

ULVAC Cryo Co., Ltd.

16,000 hours

CRYO-U16

Available upon quote

Nitrogen 5,000L/s

UVG-400

10^-7 (10^-9) Pa (Torr)

ULVAC Cryo Co., Ltd.

16,000 hours

CRYO-U16P

Available upon quote

Nitrogen 5,000L/s

UVG-400

10^-7 (10^-9) Pa (Torr)

ULVAC Cryo Co., Ltd.

16,000 hours

CRYO-U20P

Available upon quote

Nitrogen 10,000L/s

UVG-500

10^-7 (10^-9) Pa (Torr)

ULVAC Cryo Co., Ltd.

16,000 hours

CRYO-U20H

Available upon quote

Nitrogen 10,000L/s

UVG-500, 20BANSI, ISO-500

10^-7 (10^-9) Pa (Torr)

ULVAC Cryo Co., Ltd.

16,000 hours

CRYO-U22P

Available upon quote

Nitrogen 11,500L/s

UVG-550

10^-7 (10^-9) Pa (Torr)

ULVAC Cryo Co., Ltd.

16,000 hours

Click on the part number for more information about each product

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About Company Handling This Product

Sanko Ematech Co., Ltd.

  • Japan

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Vacuum Pumps　Sanko Ematech Co., Ltd.
Sanko Ematech Co., Ltd.

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