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  4. 12 inch compatible wafer wax applicator TEC-1001MB (Kumasan Medix Co., Ltd.)
12 inch compatible wafer wax applicator TEC-1001MB-TEC-1001MB
12 inch compatible wafer wax applicator TEC-1001MB-Kumasan Medix Co., Ltd.

12 inch compatible wafer wax applicator TEC-1001MB
Kumasan Medix Co., Ltd.

About This Product

The wafer waxing process is an important process that greatly affects the polishing condition and thickness accuracy of the wafer. This is a dedicated device for wafer waxing that achieves high-quality grinding and polishing processes. Features

■Paste condition control

Pressure, temperature, and time conditions can be set according to the characteristics of the wafer, and damage to devices can be suppressed.

■Measures against uneven wax thickness

By optimizing the heating and cooling mechanism and designing a highly rigid mechanism, we achieve uniform temperature distribution and stable load distribution, and prevent wax thickness unevenness that affects accuracy.

■12 inch wafer compatible

With a maximum diameter of 12 inches, it can handle a variety of workpieces, including sapphire, SiC, GaAs, GaN, InP, Si, and compound semiconductor wafers.

  • Product

    12 inch compatible wafer wax applicator TEC-1001MB

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1 Models of 12 inch compatible wafer wax applicator TEC-1001MB

Image Part Number Price (excluding tax) Size (width x depth x height) Wafer pressure unit setting unit Wafer pressure section maximum pressure Wafer wax pasting section Applicable plate size for pasting Wafer wax pasting section Setting unit Wafer wax pasting area Temperature control accuracy Wafer wax attachment part temperature distribution accuracy Wafer wax pasting section Heating/cooling setting temperature range
12 inch compatible wafer wax applicator TEC-1001MB-Part Number-TEC-1001MB

TEC-1001MB

Available upon quote

650mm x 850mm x 1,833mm

1kPa

300kPa

Φ180~φ320mm, thickness 5~30mm

1℃

Within ±3℃

Within ±5℃

Ambient temperature ~160℃

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About Company Handling This Product

Kumasan Medix Co., Ltd.

  • Japan

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Semiconductor Manufacturing Equipment Component & Part Machining
Semiconductor Manufacturing Equipment Component & Part Machining　Kumasan Medix Co., Ltd.
Kumasan Medix Co., Ltd.

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