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  2. Semiconductor Manufacturing
  3. Chemical Mechanical Polishing (CMP) Machines
  4. CMP process/material characterization machine TriboLab CMP (Bruker Corporation)
CMP process/material characterization machine TriboLab CMP-TriboLab CMP
CMP process/material characterization machine TriboLab CMP-Bruker Corporation

CMP process/material characterization machine TriboLab CMP
Bruker Corporation

About This Product

■CMP process/material property evaluation system

TriboLab CMP is based on Bruker's highly robust friction and wear tester UMT TriboLab and provides high performance evaluation for CMP (Chemical Mechanical Polishing) process development. A wide range of polishing pressures (0.05 to 50 psi) and rotational speeds (1 to 500 rpm), friction coefficient measurement, AE signal (acoustic emission), and sample temperature for evaluation of consumable materials such as pads and slurries used in CMP processes. Measurements etc. are possible. Bruker's TriboLab CMP process and materials evaluation system enables the reproduction of a reliable, cost-effective benchtop wafer chemical polishing process environment.

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    CMP process/material characterization machine TriboLab CMP

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1 Models of CMP process/material characterization machine TriboLab CMP

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CMP process/material characterization machine TriboLab CMP-Part Number-TriboLab CMP

TriboLab CMP

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Bruker Corporation

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Bruker, founded in 1960 and based in Billerica, Massachusetts, is a manufacturer and distributor of scientific...

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Chemical Mechanical Polishing (CMP) Machines
Chemical Mechanical Polishing (CMP) Machines　Bruker Corporation
Bruker Corporation

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