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  4. Plasma generation power supply/automatic matching box High performance type (DAIHEN Corporation)
Plasma generation power supply/automatic matching box High performance type-27.12MHz high frequency power supply 500W~5kW
Plasma generation power supply/automatic matching box High performance type-DAIHEN Corporation

Plasma generation power supply/automatic matching box High performance type
DAIHEN Corporation

DAIHEN Corporation's Response Status

Response Rate

100.0%

Response Time

120.5hours

About This Product

High frequency power supply with 2-level pulse output function

■Features

・Also compatible with cutting-edge processes such as 3D NAND and FinFET ・Contributing to process development that requires high selectivity and uniformity ・Expand product lineup to low power range such as 500W and 1kW

  • Product

    Plasma generation power supply/automatic matching box High performance type

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3 Models of Plasma generation power supply/automatic matching box High performance type

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Rated output Dimensions Height (H) External dimensions Width (W) Dimensions Depth (L) Output stability Pulse frequency
Plasma generation power supply/automatic matching box High performance type-Part Number-27.12MHz high frequency power supply 500W~5kW

27.12MHz high frequency power supply 500W~5kW

Available upon quote

500W/1kW/2kW/3kW/5kW

500W/1kW/2kW/3kW:133mm (3U)
5kW:222mm (5U)

500W/1kW:215mm
2kW/3kW/5kW:420mm

500W/1kW:430mm
2kW/3kW/5kW:500mm

Within ±1% or ±3W, whichever is greater

1Hz - 100kHz (2 levels)

Plasma generation power supply/automatic matching box High performance type-Part Number-40.68MHz high frequency power supply 500W~5kW

40.68MHz high frequency power supply 500W~5kW

Available upon quote

500W/1kW/2kW/3kW/5kW

500W/1kW/2kW/3kW:133mm (3U)
5kW:222mm (5U)

500W/1kW:215mm
2kW/3kW/5kW:420mm

500W/1kW:430mm
2kW/3kW/5kW:500mm

Within ±1% or ±3W, whichever is greater

1Hz - 100kHz (2 levels)

Plasma generation power supply/automatic matching box High performance type-Part Number-60MHz high frequency power supply/automatic matching box 500W~5kW

60MHz high frequency power supply/automatic matching box 500W~5kW

Available upon quote

500W/1kW/2kW/3kW/5kW

500W/1kW/2kW/3kW:133mm (3U)
5kW:222mm (5U)

500W/1kW:215mm
2kW/3kW/5kW:420mm

500W/1kW:430mm
2kW/3kW/5kW:500mm

Within ±1% or ±3W, whichever is greater

1Hz - 100kHz (2 levels)

Click on the part number for more information about each product

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About Company Handling This Product

DAIHEN Corporation

Response Rate

100.0%

Response Time

120.5hrs

Company Overview

DAIHEN Corporation, established in 1919 and headquartered in Osaka, Japan, is a manufacturer of Power Products...

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  • Japan

Related search keywords

High Frequency Power Supplies
High Frequency Power Supplies　DAIHEN Corporation
DAIHEN Corporation

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