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Plasma generation power supply/automatic matching box standard type-400kHz high frequency power supply 500W~20kW
Plasma generation power supply/automatic matching box standard type-13.56MHz high frequency power supply 500W to 30kW standard type
Plasma generation power supply/automatic matching box standard type-DAIHEN Corporation

Plasma generation power supply/automatic matching box standard type
DAIHEN Corporation

DAIHEN Corporation's Response Status

Response Rate

100.0%

Response Time

120.5hours


About This Product

■400kHz/500W~20kW, 2MHz/500W~20kW, 4MHz/500W~20kW

High frequency with pulse output function

■13.56MHz/3kW~30kW

Compact, high efficiency, high frequency power supply

■Features

・Equipped with pulse function ・Compatible with full support including matching box ・High-power models are also available to support high-power processes.

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    Plasma generation power supply/automatic matching box standard type

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7 Models of Plasma generation power supply/automatic matching box standard type

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Allowable passing power Matching speed Matching accuracy Frequency range Cooling method Rated output Dimensions Height (H) External dimensions Width (W) Dimensions Depth (L) Output stability Pulse frequency
Plasma generation power supply/automatic matching box standard type-Part Number-400kHz high frequency power supply 500W~20kW

400kHz high frequency power supply 500W~20kW

Available upon quote - - - -

Forced air cooling + water cooling method

500W/1kW/3kW/5kW

500W/1kW:133mm (3U)
3kW:177mm (4U)

500W/1kW:215mm
3kW:420mm

500W/1kW:500mm
3kW:520mm
5kW:600mm

Within ±1% or ±3W, whichever is greater

1Hz - 20kHz (1 level)

Plasma generation power supply/automatic matching box standard type-Part Number-2MHz high frequency power supply 500W~20kW

2MHz high frequency power supply 500W~20kW

Available upon quote - - - -

Forced air cooling + water cooling method

500W/1kW/3kW/5kW

133mm (3U)

500W/1kW:215mm
3kW/5kW:430mm

500W/1kW:500mm
3kW/5kW:520mm

Within ±1% or ±3W, whichever is greater

1Hz - 50kHz (1 level)

Plasma generation power supply/automatic matching box standard type-Part Number-4MHz high frequency power supply 500W~20kW

4MHz high frequency power supply 500W~20kW

Available upon quote - - - -

Forced air cooling + water cooling method

500W/1kW/3kW/5kW

133mm (3U)

500W/1kW:215mm
3kW:420mm

500W/1kW:500mm
3kW/5kW:520mm

Within ±1% or ±3W, whichever is greater

1Hz - 50kHz (1 level)

Plasma generation power supply/automatic matching box standard type-Part Number-13.56MHz high frequency power supply 500W to 30kW standard type

13.56MHz high frequency power supply 500W to 30kW standard type

Available upon quote - - - -

Forced air cooling + water cooling method

3kW/5kW

133mm (3U)

3kW:215mm
5kW:420mm

3kW:540mm
5kW:440mm

Within ±1% or ±3W, whichever is greater

1Hz-100lHz (1 level)

Plasma generation power supply/automatic matching box standard type-Part Number-13.56MHz high frequency power supply 500W to 30kW Standard type Large capacity model

13.56MHz high frequency power supply 500W to 30kW Standard type Large capacity model

Available upon quote - - - -

Forced air cooling + water cooling method

15kW/30kW

15kW:370mm
30kw:560mm

430mm

850mm

Within ±1% or ±3W, whichever is greater

1Hz-100lHz (1 level)

Plasma generation power supply/automatic matching box standard type-Part Number-13.56MHz high frequency power supply 500W to 30kW high performance type

13.56MHz high frequency power supply 500W to 30kW high performance type

Available upon quote - - - - -

500W/1kW/2kW/3kW/5kW

500W/1kW2kW/3kW:133mm (3U)
5kW:222mm

500W/1kW:215mm
2kW/3kW:420mm

500W/1kW:430mm
2kW/3kW/5kW:500mm

Within ±1% or ±3W, whichever is greater

1Hz-100lHz (2 levels)

Plasma generation power supply/automatic matching box standard type-Part Number-13.56MHz automatic matching box

13.56MHz automatic matching box

Available upon quote

500W~30kW

Within 3 seconds

Within 1% (power ratio)

13.56MHz

Water cooling, forced air cooling

- - - - - -

Click on the part number for more information about each product

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About Company Handling This Product

Response Rate

100.0%


Response Time

120.5hrs

Company Overview

DAIHEN Corporation, established in 1919 and headquartered in Osaka, Japan, is a manufacturer of Power Products...

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