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CHEMFISH TOKYO Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

91.5hours


About This Product

■Summary

Semiconductor ALD/CVD precursors are the core raw materials for semiconductor thin film deposition processes, allowing metal/oxide/nitride thin films to be prepared by chemical vapor deposition (CVD) and atomic layer deposition (ALD), and - Used in 14nm and even 7nm advanced technology node IC manufacturing processes. Even the 7nm advanced technology node of integrated circuit manufacturing process is widely used in high-end chip manufacturing, including logic chips, AI chips, 5G chips, mass memory, and cloud computing chips. We have a wide variety of ALD/CVD precursor materials and technologies, and can provide a wide variety of products including trimethylaluminum.

  • Product

    CVD/ALD materials

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10 Models of CVD/ALD materials

Click on the part number for more information about each product

Image Part Number Price (excluding tax) English chemical name Element CAS Code

Trimethylaluminum

Available upon quote

Trimethylaluminum

Al

75-24-1

TMA

Trimethyl (trimethylphosphine) gold

Available upon quote

Trimethyl (trimethylphosphine) gold

Au

33012-33-8

Me3Au (PMe3)

Trimethyl (triethylphosphine) gold

Available upon quote

Trimethyl (triethylphosphine) gold

Au

-

Me3Au (PEt3)

Dicarbonylcyclopentadienyl cobalt

Available upon quote

Carbonyl cyclopentadienyl cobalt

Co

12078-25-0

CpCo(CO)2

N, N′-di-tert-butylethylaminocobalt

Available upon quote

Bis (N,N'-di-t-butylacetamidinato) cobalt

Co

-

Co (t-Bu-Me-AMD) 2

Dimethylamine-2-propanol copper

Available upon quote

Bis (dimethylamino-2-propoxy) copper

Cu

185827-91-2

Cu (dmap) 2

Bis(hexafluoroacetylacetonato) copper

Available upon quote

Copper hexafluoroacetylacetonate

Cu

14781-45-4

Cu (hfac) 2

N, N′-diisopropylethylaminocopper

Available upon quote

Bis (N,N'-di-isopropylacetamidinato) copper

Cu

-

Cu (i-Pr-Me-AMD) 2

N, N′-di-tert-butylethylazinyl copper

Available upon quote

Bis (N,N'-di-t-butylacetamidinato) copper

Cu

-

Cu (t-Bu-Me-AMD) 2

Tetra (dimethylamine) germanium

Available upon quote

Tetrakis (dimethylamino) germanium

Ge

7344-40-3

TDMAGe

Click on the part number for more information about each product

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About Company Handling This Product

Response Rate

100.0%


Response Time

91.5hrs

  • Japan

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