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DSOI Wafer-DSOI Wafer Wafer diameter 100mm
DSOI Wafer-Icemos Technology Japan Co., Ltd.

About This Product

Widely used for IC and MEMS. An application engineer can help you select the best combination of parameters to process your DSOI wafer. We can handle everything from small lots at the experimental development level to mass production. MEMS process engineers also have experience in optical, inertial, biological, and other MEMS fields. We also offer additional foundry services such as MEMS, trench etching, and isolation structures. With our processes based on 6 Sigma statistical control methods, we strive for world-class product quality through continuous improvement, and remain the ideal partner for our customers.

■Application

・SOI solution for MEMS/MST ・Microfluidics/flow sensor ・RF MEMS ・Light macro machine ・Optoelectronics ・Optical MEMS

■Final market

・Telecommunications ·medical care ·car ・Home appliances ・Security

  • Product

    DSOI Wafer

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4 Models of DSOI Wafer

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Buried oxide film Thermal oxide film Buried oxide film thickness Handle layer thickness tolerance range Handle layer doping Handle layer dopant type Handle layer layer thickness range Handle layer back side treatment Handle layer crystal orientation Handle layer resistivity Handle layer thickness Handle layer silicon growth method Device layer (first film, second film) film thickness Device layer (first film, second film) crystal orientation Device layer (first film, second film) resistivity Device layer (first film, second film) thickness tolerance range Device layer (first film, second film) doping Device layer (first film, second film) dopant type Device layer (first film, second film) Silicon growth method
DSOI Wafer-Part Number-DSOI Wafer Wafer diameter 100mm

DSOI Wafer Wafer diameter 100mm

Available upon quote

0.2-4.0μm by handle, device or both wafers

±5μm

N type: Phos, Red Phos, Sb&As P type: Boron

N or P

280-1,150μm

By lapping, etching or polishing

100, 111 or 110

≤0.001 - ≥10,000 Ω-cm

200-1,100μm

CZ, MCZ or FZ

≥1.5μm

100, 111 or 110

≤0.001 - ≥10,000 Ω-cm

±0.5 μm

N type: Phos, Red Phos, Sb&As P type: Boron

N or P

CZ, MCZ or FZ

DSOI Wafer-Part Number-DSOI Wafer Wafer diameter 125mm

DSOI Wafer Wafer diameter 125mm

Available upon quote

0.2-4.0μm by handle, device or both wafers

±5μm

N type: Phos, Red Phos, Sb&As P type: Boron

N or P

280-1,150μm

By lapping, etching or polishing

100, 111 or 110

≤0.001 - ≥10,000 Ω-cm

200-1,100μm

CZ, MCZ or FZ

≥1.5μm

100, 111 or 110

≤0.001 - ≥10,000 Ω-cm

±0.5 μm

N type: Phos, Red Phos, Sb&As P type: Boron

N or P

CZ, MCZ or FZ

DSOI Wafer-Part Number-DSOI Wafer Wafer diameter 150mm

DSOI Wafer Wafer diameter 150mm

Available upon quote

0.2-4.0μm by handle, device or both wafers

±5μm

N type: Phos, Red Phos, Sb&As P type: Boron

N or P

280-1,150μm

By lapping, etching or polishing

100, 111 or 110

≤0.001 - ≥10,000 Ω-cm

200-1,100μm

CZ, MCZ or FZ

≥1.5μm

100, 111 or 110

≤0.001 - ≥10,000 Ω-cm

±0.5 μm

N type: Phos, Red Phos, Sb&As P type: Boron

N or P

CZ, MCZ or FZ

DSOI Wafer-Part Number-DSOI Wafer Wafer diameter 200mm

DSOI Wafer Wafer diameter 200mm

Available upon quote

0.2-4.0μm by handle, device or both wafers

±5μm

N type: Phos, Red Phos, Sb&As P type: Boron

N or P

280-1,150μm

By lapping, etching or polishing

100, 111 or 110

≤0.001 - ≥10,000 Ω-cm

450-1,100μm

CZ, MCZ or FZ

≥5μm

100, 111 or 110

≤0.001 - ≥10,000 Ω-cm

±0.8 μm

N type: Phos, Red Phos, Sb&As P type: Boron

N or P

CZ, MCZ or FZ

Click on the part number for more information about each product

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