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SOI Wafer-SOI Wafer Wafer diameter 100mm
SOI Wafer-Icemos Technology Japan Co., Ltd.

About This Product

It is a wafer with specifications that can be applied to a wide range of applications such as IC and MEMS applications, and can respond to a wide range of markets. Through experience with various SOI substrates, our highly skilled team of application engineers will help you select parameter estimates according to your requirements and provide you with the perfect custom SOI solution. We constantly promote continuous improvement through process management based on 6 Sigma statistical control methods, and provide world-class product quality. With our fully competitive costs and flexible response, we will continue to be an ideal partner for SOI.

■Application

・Advanced pressure sensor ・Accelerometer ・Gyroscope ・Microfluidics/flow sensor ・RF MEMS ・Optical micromachines/optical MEMs ・Optoelectronics ・Smart power ・Cutting-edge Analog IC technology ・Microphone ・Luxury watches

■Final market

・Telecommunications ·medical care ·car ・Consumer ·musical instrument

  • Product

    SOI Wafer

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4 Models of SOI Wafer

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Buried oxide film Thermal oxide film Buried oxide film thickness Handle layer thickness tolerance range Handle layer layer thickness range Handle layer back side treatment Handle layer crystal orientation Handle layer resistivity Handle layer thickness Handle layer doping Handle layer dopant type Handle layer silicon growth method Device layer thickness Device layer crystal orientation Device layer resistivity Device layer Buried layer implant Device layer doping Device layer dopant type Device layer Silicon growth method Device Thickness Tolerance Range
SOI Wafer-Part Number-SOI Wafer Wafer diameter 100mm

SOI Wafer Wafer diameter 100mm

Available upon quote

0.2-4.0μm grown on handle, device or both

±5μm

280-1,150μm

By lapping, etching or polishing

100, 111 or 110

≤0.001 - ≥10,000 Ω-cm

200-1,100μm

N type: Phos, Red Phos, Sb&As P type: Boron

N or P

CZ, MCZ or FZ

≥1.5μm

100, 111 or 110

≤0.001 - ≥10,000 Ω-cm

N type or P type

N type: Phos, Red Phos, Sb&As P type: Boron

N or P

CZ, MCZ or FZ

±0.5 μm

SOI Wafer-Part Number-SOI Wafer Wafer diameter 125mm

SOI Wafer Wafer diameter 125mm

Available upon quote

0.2-4.0μm grown on handle, device or both

±5μm

280-1,150μm

By lapping, etching or polishing

100, 111 or 110

≤0.001 - ≥10,000 Ω-cm

200-1,100μm

N type: Phos, Red Phos, Sb&As P type: Boron

N or P

CZ, MCZ or FZ

≥1.5μm

100, 111 or 110

≤0.001 - ≥10,000 Ω-cm

N type or P type

N type: Phos, Red Phos, Sb&As P type: Boron

N or P

CZ, MCZ or FZ

±0.5 μm

SOI Wafer-Part Number-SOI Wafer Wafer diameter 150mm

SOI Wafer Wafer diameter 150mm

Available upon quote

0.2-4.0μm grown on handle, device or both

±5μm

280-1,150μm

By lapping, etching or polishing

100, 111 or 110

≤0.001 - ≥10,000 Ω-cm

200-1,100μm

N type: Phos, Red Phos, Sb&As P type: Boron

N or P

CZ, MCZ or FZ

≥1.5μm

100, 111 or 110

≤0.001 - ≥10,000 Ω-cm

N type or P type

N type: Phos, Red Phos, Sb&As P type: Boron

N or P

CZ, MCZ or FZ

±0.5 μm

SOI Wafer-Part Number-SOI Wafer Wafer diameter 200mm

SOI Wafer Wafer diameter 200mm

Available upon quote

0.2-4.0μm grown on handle, device or both

±5μm

280-1,150μm

By lapping, etching or polishing

100, 111 or 110

≤0.001 - ≥10,000 Ω-cm

200-1,100μm

N type: Phos, Red Phos, Sb&As P type: Boron

N or P

CZ, MCZ or FZ

≥5μm

100, 111 or 110

≤0.001 - ≥10,000 Ω-cm

N type or P type

N type: Phos, Red Phos, Sb&As P type: Boron

N or P

CZ, MCZ or FZ

±0.8 μm

Click on the part number for more information about each product

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