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  2. Semiconductor Manufacturing
  3. Resists
  4. Photolithography materials (photoresists) UV laser direct writing photoresists GRX-M series (Nagase ChemteX Co., Ltd.)
Photolithography materials (photoresists) UV laser direct writing photoresists GRX-M series-GRX-M series
Photolithography materials (photoresists) UV laser direct writing photoresists GRX-M series-Nagase ChemteX Co., Ltd.

Photolithography materials (photoresists) UV laser direct writing photoresists GRX-M series
Nagase ChemteX Co., Ltd.

Nagase ChemteX Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

92.9hours

About This Product

In the rapidly evolving world of ultrafine semiconductor and flat panel manufacturing, manufacturing processes are becoming increasingly diverse, and the ability to rapidly develop applicable materials is required. We are developing a unique photoresist (photosensitive material) that is compatible with the lift-off process. The lift-off process has the advantage of not requiring a wiring process using metal etching, contributing to process shortening and reducing the amount of materials used. We also accept consultations on material development tailored to customers' individual needs and detailed requests.

■Features

- Can be coated with spin coater or CAP coater. - Has good coating properties on large glass substrates. ・Exposure wavelength range: G-line to I-line (broadband compatible). - Suitable for laser drawing. ・Can be developed with organic/inorganic alkali ・Improved in-plane line width uniformity on large glass substrates during direct laser writing by optimizing the composition. ・Improved metal etching performance by optimizing the pattern shape. ・Excellent substrate adhesion with little side etching. ・Good removability

■Applications

LCD display, mask blanks

  • Product

    Photolithography materials (photoresists) UV laser direct writing photoresists GRX-M series

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1 Models of Photolithography materials (photoresists) UV laser direct writing photoresists GRX-M series

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Photolithography materials (photoresists) UV laser direct writing photoresists GRX-M series-Part Number-GRX-M series

GRX-M series

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About Company Handling This Product

Nagase ChemteX Co., Ltd.

Response Rate

100.0%

Response Time

92.9hrs

  • Japan

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