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Imaging technology that visualizes dopant concentration and dopant type in the nano-scale Scanning capacitance microscopy (SCM)-Scanning capacitance microscopy (SCM)
Imaging technology that visualizes dopant concentration and dopant type in the nano-scale Scanning capacitance microscopy (SCM)-Oxford Instruments Ltd.

Imaging technology that visualizes dopant concentration and dopant type in the nano-scale Scanning capacitance microscopy (SCM)
Oxford Instruments Ltd.


About This Product

■Summary

・Scanning capacitance microscopy (SCM) is an imaging method that uses microwave RF signals to visualize charge carrier positions, dopant concentrations, and dopant types (p-type vs. n-type) in semiconductors and other materials in the nanometer range. It's technology. -SCM can be used with Jupiter XR AFM and Cypher systems. - Designed using the latest technology, Oxford Instruments' SCM offers higher performance and functionality than traditional SCMs.

■Features

-In addition to dC/dV, it also measures capacitance, which is linearly correlated with dopant concentration, making data interpretation easier. ・Scanning is more than 20 times faster than conventional methods, increasing productivity. (Imaging one frame in just 10 seconds) - High sensitivity enables measurement of semiconductors, energy storage devices such as batteries, 2D materials, etc. ・High-resolution imaging technology reveals the electrical properties of extremely small structures.

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    Imaging technology that visualizes dopant concentration and dopant type in the nano-scale Scanning capacitance microscopy (SCM)

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1 Models of Imaging technology that visualizes dopant concentration and dopant type in the nano-scale Scanning capacitance microscopy (SCM)

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Imaging technology that visualizes dopant concentration and dopant type in the nano-scale Scanning capacitance microscopy (SCM)-Part Number-Scanning capacitance microscopy (SCM)

Scanning capacitance microscopy (SCM)

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