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  4. Quartz glass wafer transfer equipment (PHT Co., Ltd.)
Quartz glass wafer transfer equipment-Quartz glass wafer transfer equipment
Quartz glass wafer transfer equipment-PHT Co., Ltd.

Quartz glass wafer transfer equipment
PHT Co., Ltd.

About This Product

This device is a system that automatically transfers quartz glass wafers in single wafers between carriers of stage ① and stage ②. The cassette used is a FOUP/FOSB carrier. Basically, the carrier is set on the stage by the operator.

  • Product

    Quartz glass wafer transfer equipment

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1 Models of Quartz glass wafer transfer equipment

Image Part Number Price (excluding tax) Wafer storage pitch Takt time/transfer time Thickness Warp Contactable range Diameter
Quartz glass wafer transfer equipment-Part Number-Quartz glass wafer transfer equipment

Quartz glass wafer transfer equipment

Available upon quote

10mm

6 minutes 30 seconds / 25 images or less

400~700μm

40μm or less

Back side of wafer

Φ300mm±0.2mm

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About Company Handling This Product

PHT Co., Ltd.

  • Japan

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