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| Image | Part Number | Price (excluding tax) | EMO contact output | Interlock | Career | Number of ports | Transport target | Positive pressure (source pressure) | Positive pressure (flow rate) | Current consumption | Vacuum (source pressure) | Vacuum (flow rate) | Power supply voltage |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
|
|
TYK2102-2 |
Available upon quote |
2 systems (dry contact) |
8 input points/8 output points (isolated I/O) |
300mm FOUP 25 stages (SEMI E47.1) |
2 ports |
300mm wafer diameter: Φ300±0.2mm Thickness: 775μm |
0.6MPa~0.7MPa |
20L/min |
4kVA (20A/200VAC) including FFU |
-80kPa~-90kPa |
40L/min |
Single phase AC200V±10% 50/60Hz±5% |
|
|
TYK2102-3 |
Available upon quote |
2 systems (dry contact) |
8 input points/8 output points (isolated I/O) |
300mm FOUP 25 stages (SEMI E47.1) |
3 ports |
300mm wafer diameter: Φ300±0.2mm Thickness: 775μm |
0.6MPa~0.7MPa |
30L/min |
4kVA (20A/200VAC) including FFU |
-80kPa~-90kPa |
50L/min |
Single phase AC200V±10% 50/60Hz±5% |
Click on the part number for more information about each product
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