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  4. Wafer transfer robot (PHT Co., Ltd.)
Wafer transfer robot-PHT-R-4-2022
Wafer transfer robot-PHT Co., Ltd.

Wafer transfer robot
PHT Co., Ltd.

About This Product

This is a horizontally articulated robot used in clean rooms. It can move forward and backward (X-axis), rotate (θ-axis), up and down (Z-axis) + hand rotation (0 to 180°), and can handle wafer transport in the atmosphere. The drive motor is an AC servo motor with absolute encoder specifications for all axes.

  • Product

    Wafer transfer robot

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1 Models of Wafer transfer robot

Image Part Number Price (excluding tax) Arm Wafer holding method Cleanliness Motor type Control cable Control specifications (1) Control specifications (2) Control axis Operating range Operating speed (fastest) Payload Rated voltage Rated current Mechanical structure type Repeatability Transported object Installation environment Weight
Wafer transfer robot-Part Number-PHT-R-4-2022

PHT-R-4-2022

Available upon quote

Single arm Material Aluminum/CFRP/Ceramic

Vacuum suction/edge clamp/edge hold

ISO class 2 (0.1μm or more, 10 pieces/m³ or less)

AC servo motor absolute encoder specifications

3m (standard) ・5m・10m

Parallel interface 32 input points, 32 output points

Serial interface RS-232C x 1 line

4 axes

X-axis: 500mm
θ axis: 340deg
Z-axis: 300mm
Hand rotation: 0~180°

X-axis: 500mm/sec
θ axis: 200deg/sec
Z-axis: 250mm/sec
Hand rotation: 180deg/sec

3kg (total weight of hand base, hand, and workpiece)

Single phase AC200~230V±10%

5A vacuum: -80kPa or less 10NL/min or more

Horizontal articulated cylindrical coordinate system

±0.1mm or less

~300mm wafer

Inside the clean room Atmospheric temperature 10℃~35℃ Humidity 70%RH or less

Body weight: approx. 47kg
Controller: Approx. 8kg

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About Company Handling This Product

PHT Co., Ltd.

  • Japan

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