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  4. Wafer transfer device (PHT Co., Ltd.)
Wafer transfer device-PWT2020
Wafer transfer device-PHT Co., Ltd.

Wafer transfer device
PHT Co., Ltd.

About This Product

Next-generation silicon wafers are 1.5 times larger in diameter, from 300 mm to 450 mm, and their weight has increased from about 130 g to 450 g to 700 g, causing them to sag. For this reason, a problem has arisen in that conventional transfer robots cannot perform accurate handling. This device solves this problem and makes it possible to transport large silicon wafers at high speed and with high precision.

■Summary

・This is a system that applies clean robots. ・Transfers 300mm wafers one by one to cassettes (containers) A to B. - Compatible cassettes (containers) are FOUP, FOSB, OPEN, and PFA. ・Transportation in units of 1 sheet is standard, but transportation in units of 5 sheets or 25 sheets is also possible. - Safely transport wafers in bulk between cassettes - Slot-specific transport (can be transported within the same carrier). ・Since the wafer is loaded/unloaded by lifting it from the cassette, contact with the cassette is minimized, preventing wear, dust generation, and damage to the wafer edge. Wafer mapping detects loading errors such as wafer misalignment and double wafer stacking. Equipped with a sensor to prevent erroneous operation and an emergency button.

■Features

・Space saving ・Static electricity countermeasure type ・Monitor errors with optical and mechanical sensors ・With mapping sensor ・Compatible with FOUP, FOSB, and H-Square metal cassettes ・Class 10 clean room compatible

  • Product

    Wafer transfer device

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1 Models of Wafer transfer device

Image Part Number Price (excluding tax) Cassette (container) Throughput Work Work size Work thickness Safety mechanism Transport unit Device size Equipment weight Power supply Drive method Option
Wafer transfer device-Part Number-PWT2020

PWT2020

Available upon quote

FOUP・FOSB・OPEN・PFA

25 sheets/1 cassette transport time 300 seconds or less

Semiconductor substrate

300mm

600~850μm

Cassette presence, wafer presence, overload detection,
Abnormal alarm, emergency stop

1 sheet unit, 5 sheet unit, 25 sheet unit

W1,000×D1,400×H1,800mm

Approximately 500kg

AC200V, 15A

Motor drive (servo)

Static electricity eliminator (ionizer), full coverage, area sensor ID reader, alignment, wafer reversal, etc.

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About Company Handling This Product

PHT Co., Ltd.

  • Japan

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