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Compact, with aperture P-612.2 XY piezo nanopositioner-P-612.20L
Compact, with aperture P-612.2 XY piezo nanopositioner-PI Japan Co., Ltd.

Compact, with aperture P-612.2 XY piezo nanopositioner
PI Japan Co., Ltd.

PI Japan Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

26.5hours

Relatively Fast Response


About This Product

■Features

・Compact: Surface 60mm x 60mm ・100μm×100μm closed loop movement range (130μm×130μm, open loop) ・For cost-sensitive applications ・Effective aperture 20mm x 20mm ・Reduction of response time and improvement of multi-axis accuracy by parallel kinematics ・Excellent lifespan with PICMA® piezo actuator ・Also available as a compact version

■Application field

・Scanning microscopy ・High-throughput microscopy ・Super resolution microscope ・Mask/wafer positioning ・Interferometer ・Measurement technology ・Biotechnology ・Micromanipulation

■Excellent lifespan with PICMA® piezo actuator

- All patented PICMA® piezo actuators are ceramic insulated. This protects against failure due to moisture and increased leakage current. - PICMA® actuators offer up to 10 times longer lifespan than traditional polymer-insulated actuators. - Proven to have never failed after 100 billion cycles.

■High guide accuracy with zero-play deflection guide

- Deflection guides require no maintenance, no friction, no wear, and no lubrication required. - Due to its high rigidity, it can withstand high loads and is insensitive to shock and vibration. Operates over a wide temperature range.

  • Product

    Compact, with aperture P-612.2 XY piezo nanopositioner

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2 Models of Compact, with aperture P-612.2 XY piezo nanopositioner

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Resonant frequency of X, under 100g load Resonant frequency in X direction, no load Stiffness in X direction Travel range in X direction, open loop, -20 to 120 V Resolution in X direction, open loop Allowable tensile force in the X direction Allowable pressing force in the X direction Resonance frequency in Y direction, under 100g load Resonant frequency in Y direction, no load Stiffness in Y direction Y-direction travel range, open loop, -20 to +120 V Resolution in Y direction, open loop Allowable pressing force in Y direction Allowable pressing force in Z direction Active axis Guide Drive type Pitch (rotational crosstalk in the θY direction due to movement in the X direction) Pitch (rotational crosstalk in the θX direction due to movement in the Y direction) Yaw (rotational crosstalk in the θZ direction with movement in the X direction) Yaw (rotational crosstalk in the θZ direction with movement in the Y direction) Electric capacity System resolution in X Reproducibility in X Movement range in the X direction System resolution in Y Repeatability in Y direction Movement range in Y direction Linearity error Integrated sensor
Compact, with aperture P-612.2 XY piezo nanopositioner-Part Number-P-612.20L

P-612.20L

Available upon quote

200Hz

400Hz

0.15N/μm

130μm

0.8nm

5N

15N

200Hz

400Hz

0.15N/μm

130μm

0.8nm

15N

15N

XY

Deflection guide with lever amplification function

Pikma®

±10μrad

±10μrad

±10μrad

±50μrad

1.5μF

- - - - - - - -
Compact, with aperture P-612.2 XY piezo nanopositioner-Part Number-P-612.2SL

P-612.2SL

Available upon quote

200Hz

400Hz

0.15N/μm

130μm

0.8nm

5N

15N

200Hz

400Hz

0.15N/μm

130μm

0.8nm

15N

15N

XY

Deflection guide with lever amplification function

Pikma®

±10μrad

±10μrad

±10μrad

±50μrad

1.5μF

5nm

<10nm

100μm

5nm

<10nm

100μm

0.40%

SGS, indirect position measurement

Click on the part number for more information about each product

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About Company Handling This Product

Response Rate

100.0%


Response Time

26.5hrs

  • Japan

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