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History
Response Rate
100.0%
Response Time
26.5hours
Relatively Fast Response
Product
Large diameter and high dynamics P-518 • P-528 • P-558 Piezo Z/Tip/Tilt StageHandling Company
PI Japan Co., Ltd.Categories
Click on the part number for more information about each product
| Image | Part Number | Price (excluding tax) | Bidirectional reproducibility in Z (nm) | Z linearity error (%) | System resolution in Z (nm) | Resolution in Z, open loop (nm) | Stiffness in Z (N/μm) | Travel range in Z (µm) | Capacitance in Z (μF) | Bidirectional repeatability in θX (µrad) | Linearity error of θX (%) | System resolution in θX (µrad) | Resolution in θX, open loop (µrad) | Rotation range in θX (mrad) | Rotation range in θX, open loop (mrad) | Linearity error of θY (%) | System resolution in θY (µrad) | Resolution in θY, open loop (µrad) | Rotation range in θY units (mrad) | Active axis | Guide | Drive type | Pitch (θY unit rotation crosstalk Z unit movement) (µrad) | Yaw (rotational crosstalk in θX and motion in Z) (µrad) | Roll (rotational crosstalk (θZ, Z movement) (µrad) | Resonant frequency (Z), no load (Hz) | Resonant frequency (in Z) under 2,500g load (Hz) | Resonant frequency (in Z) under 500g load (Hz) | Bidirectional repeatability (θY) (µrad) | Rotation range (θY), open loop (mrad) | Travel range (Z), open loop (µm) | Integrated sensor |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
|
|
P-518.TCD |
Available upon quote |
±5 |
0.03 |
0.8 |
0.4 |
2.7 |
100 |
2.1 |
±0.05 |
0.15 |
0.05 |
0.04 |
1 |
1.4 |
0.15 |
0.05 |
0.04 |
1 |
ZθXθY |
Bending guide with lever amplification |
Pikma® |
±25 |
±.25 |
±5 |
500 |
200 |
350 |
0.05 |
1.4 |
140 |
Capacitive, indirect position measurement |
|
|
P-518.ZCD |
Available upon quote |
±5 |
0.03 |
0.8 |
0.2 |
2.7 |
100 |
8.4 |
- | - | - | - | - | - | - | - | - | - |
Z |
Bending guide with lever amplification |
Pikma® |
±25 |
±.25 |
±5 |
500 |
200 |
350 |
- | - |
140 |
Capacitive, indirect position measurement |
|
|
P-518.ZCL |
Available upon quote |
±5 |
0.03 |
0.8 |
0.2 |
2.7 |
100 |
8.4 |
- | - | - | - | - | - | - | - | - | - |
Z |
Bending guide with lever amplification |
Pikma® |
±25 |
±.25 |
±5 |
500 |
200 |
350 |
- | - |
140 |
Capacitive, indirect position measurement |
|
|
P-528.TCD |
Available upon quote |
±10 |
0.03 |
1 |
0.6 |
1.5 |
200 |
3.7 |
±0.1 |
0.15 |
0.04 |
0.06 |
2 |
2.4 |
0.15 |
0.04 |
0.06 |
2 |
ZθXθY |
Bending guide with lever amplification |
Pikma® |
±50 |
±50 |
±10 |
350 |
130 |
210 |
±0.1 |
2.4 |
240 |
Capacitive, indirect position measurement |
|
|
P-528.ZCD |
Available upon quote |
±10 |
0.03 |
1 |
0.6 |
1.5 |
200 |
14.8 |
- | - | - | - | - | - | - | - | - | - |
Z |
Bending guide with lever amplification |
Pikma® |
±50 |
±50 |
±10 |
350 |
130 |
210 |
- | - |
240 |
Capacitive, indirect position measurement |
|
|
P-528.ZCL |
Available upon quote |
±10 |
0.03 |
1 |
0.6 |
1.5 |
200 |
14.8 |
- | - | - | - | - | - | - | - | - | - |
Z |
Bending guide with lever amplification |
Pikma® |
±50 |
±50 |
±10 |
350 |
130 |
210 |
- | - |
240 |
Capacitive, indirect position measurement |
|
|
P-558.TCD |
Available upon quote |
±5 |
0.03 |
0.5 |
0.2 |
4 |
50 |
1.5 |
±0.03 |
0.15 |
0.05 |
0.02 |
0.5 |
0.6 |
0.15 |
0.05 |
0.02 |
0.5 |
ZθXθY |
Bending guide with lever amplification |
Pikma® |
±25 |
±25 |
±5 |
570 |
245 |
410 |
±0.03 |
0.6 |
60 |
Capacitive, indirect position measurement |
|
|
P-558.ZCD |
Available upon quote |
±0.03 |
0.03 |
0.5 |
0.2 |
4 |
50 |
5 |
- | - | - | - | - | - | - | - | - | - |
Z |
Bending guide with lever amplification |
Pikma® |
±25 |
±25 |
±5 |
570 |
245 |
410 |
- | - |
60 |
Capacitive, indirect position measurement |
|
|
P-558.ZCL |
Available upon quote |
±0.03 |
0.03 |
0.5 |
0.2 |
4 |
50 |
6 |
- | - | - | - | - | - | - | - | - | - |
Z |
Bending guide with lever amplification |
Pikma® |
±25 |
±25 |
±5 |
570 |
245 |
410 |
- | - |
60 |
Capacitive, indirect position measurement |
Click on the part number for more information about each product
Reviews shown here are reviews of companies.
Reviews shown here are reviews of companies.
Response Rate
100.0%
Response Time
26.5hrs
