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L-310 V6 Vacuum precision Z stage-L-310.021211V6
L-310 V6 Vacuum precision Z stage-PI Japan Co., Ltd.

L-310 V6 Vacuum precision Z stage
PI Japan Co., Ltd.

PI Japan Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

26.5hours

Relatively Fast Response


About This Product

Product overview

■Precision class Z stage

High guide accuracy and rigidity due to ball screw and cross roller guide. Stress-relieved aluminum base for high stability. Two-phase stepping motor that achieves high torque even at low speeds and high resolution non-contact limit and reference switches (Hall effect). Reference switch with direction detection in the center of the travel range. Built-in linear encoder installed in the center.

■High-precision position measurement using incremental linear encoder

Non-contact optical linear encoders directly measure platform position with the highest accuracy. Nonlinearities, mechanical play, and elastic deformations do not affect the measurements.

■Reduction of outgassing especially for use in vacuum environments

Most notably, particularly low-outgassing materials are used to lubricate the guide and drive screw. This allows bakeout temperatures of up to 80°C. This and other modifications of the PI V6 vacuum class allow this positioner to be used up to 10-6 hectopascals.

■Application field

vacuum chamber. the study. Beamline instrumentation microscope. Assembly and inspection of electronic equipment.

■Product features

- Suitable for vacuums up to 10-6 hectopascals ・Moving range 26mm (1") ・High resolution encoder ・Stepping motor ・Zero play ball screw ・Load capacity up to 5.5kg

  • Product

    L-310 V6 Vacuum precision Z stage

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1 Models of L-310 V6 Vacuum precision Z stage

Image Part Number Price (excluding tax) Allowable pushing force at X (N) Allowable pushing force in Y units (N) Bidirectional repeatability in Z (µm) Z holding force, passive (N) Unidirectional repeatability in Z (µm) Maximum speed in Z, no load (mm/s) Minimum incremental motion in Z (µm) Driving force in the direction of positive movement in Z units (N) Travel range in Z units (mm) Allowable pushing force in Z unit (N) Driving force in the direction of negative movement in Z units (N) Active axis Guide Sensor signal Sensor signal period (µm) Drive type Pitch (θY unit rotation crosstalk and Z unit motion) (µrad) Peak voltage (V) Motor resolution Yaw (rotational crosstalk in θX and motion in Z) (µrad) Limit switch Nominal voltage (V) Reference switch Reference switch repeatability Flatness (linear crosstalk in X and motion in Z) (µm) Straightness (Y linear crosstalk and Z motion) (µm) Integrated sensor Move the mass in Z units, no load (g) Drive screw pitch (mm) Drive screw type
L-310 V6 Vacuum precision Z stage-Part Number-L-310.021211V6

L-310.021211V6

Available upon quote

100

50

±0.2

50

0.1

7.5

0.05

55

26

55

55

z

cross roller guide

Sin/cos, 1V peak to peak

20

2 phase stepper motor

±150

48

200 full steps/revision

±150

Hall effect, N/C contact, 5V, NPN

twenty four

Hall effect, N/C contact, 5V, NPN

2

±3

±3

incremental linear encoder

900

1

ball screw

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About Company Handling This Product

Response Rate

100.0%


Response Time

26.5hrs

  • Japan

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