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A-110 PIglide linear motor stage with air bearing-A-110.050A1
A-110 PIglide linear motor stage with air bearing-PI Japan Co., Ltd.

A-110 PIglide linear motor stage with air bearing
PI Japan Co., Ltd.

PI Japan Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

26.5hours

Relatively Fast Response


About This Product

■Product features

・Ideal for scanning applications and high-precision positioning ・Clean room compatible ・Motion platform size 160mm x 200mm ・Movement range up to 400mm ・Load capacity up to 100N

■Product overview

The PIglide stage is equipped with a servo-driven linear motor with preloaded air bearings and an integrated linear encoder. The combination of these non-contact components creates a frictionless motion platform that provides the highest performance, quality and longevity. High-force linear motors can drive the stage to maximum speed within milliseconds. Preloaded air bearing structure supports installation in any direction.

■Application field

PIglide positioning systems are ideal for many high-precision applications, including metrology, photonics, and precision scanning in semiconductor and flat panel display manufacturing. Frictionless motion prevents particle formation, making PIglide stages ideal for cleanroom applications.

■Accessories and options

・Encoder encoder encoder ・PIglide filter and air preparation kit ・Single-axis and multi-axis motion control device ・XY setup and individual configuration ・Granite base plate and vibration reduction system

  • Product

    A-110 PIglide linear motor stage with air bearing

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10 Models of A-110 PIglide linear motor stage with air bearing

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Positioning accuracy in X direction, calibrated (μm) Bidirectional reproducibility in X (μm) Peak force in the negative direction of motion of X (N) Driving force in the negative motion direction of X (N) Positioning accuracy in X direction, uncalibrated (μm) Acceleration in X direction, no load (m/s²) Maximum speed in X direction, no load (mm/s) Driving force in the positive movement direction in the X direction (N) Movement range in X direction (mm) Positive peak force (N) for motion in the X direction Active axis Inductance between phases (mH) Sensor signal Sensor signal period (μm) Sensor resolution (nm) Drive type Pitch (rotational crosstalk (θY, motion is X) (μrad) Peak voltage (V) Peak current (A) Yaw (rotational crosstalk of θZ motion of X) (μrad) Nominal voltage (V) Nominal current (A) Limit switch Force constant (N/A) Reference switch Flatness (linear crosstalk in Z and motion in X) (μm) Resistance phase (Ω) Straightness (linear crosstalk in Y direction with accompanying X direction) (μm) Integrated sensor Back emf phase-phase (V s/m)
A-110 PIglide linear motor stage with air bearing-Part Number-A-110.050A1

A-110.050A1

Available upon quote

0.5

0.1

60

20

1.5

20

500

20

50

60

×

6

Sin/cos, 1V peak to peak

20

4.88

Ironless 3-phase linear motor

±7.5

60

4.2

±7.5

48

1.6

hall effect

4.1

encoder index

0.5

11

0.5

incremental linear encoder

10

A-110 PIglide linear motor stage with air bearing-Part Number-A-110.050B1

A-110.050B1

Available upon quote

0.5

0.1

60

20

1.5

20

500

20

50

60

×

6

By SS-C

-

1

Ironless 3-phase linear motor

±7.5

60

4.2

±7.5

48

1.6

-

4.1

-

0.5

11

0.5

absolute linear encoder

10

A-110 PIglide linear motor stage with air bearing-Part Number-A-110.100A1

A-110.100A1

Available upon quote

0.5

0.1

60

20

1.5

20

1,000

20

100

60

×

6

Sin/cos, 1V peak to peak

20

4.88

Ironless 3-phase linear motor

±10

60

4.2

±10

48

1.6

hall effect

4.1

encoder index

0.75

11

0.75

incremental linear encoder

10

A-110 PIglide linear motor stage with air bearing-Part Number-A-110.100B1

A-110.100B1

Available upon quote

0.5

0.1

60

20

1.5

20

1,000

20

100

60

×

6

By SS-C

-

1

Ironless 3-phase linear motor

±10

60

4.2

±10

48

1.6

-

4.1

-

0.75

11

0.75

absolute linear encoder

10

A-110 PIglide linear motor stage with air bearing-Part Number-A-110.200A1

A-110.200A1

Available upon quote

0.5

0.1

85

39

2

20

1,000

39

200

85

×

1.24

Sin/cos, 1V peak to peak

20

4.88

Ironless 3-phase linear motor

±10

60

6.9

±10

48

3.2

hall effect

12.3

encoder index

1

3.6

1

incremental linear encoder

10.1

A-110 PIglide linear motor stage with air bearing-Part Number-A-110.200B1

A-110.200B1

Available upon quote

0.5

0.1

85

39

1.5

20

1,000

39

200

85

×

1.24

By SS-C

-

1

Ironless 3-phase linear motor

±10

60

6.9

±10

48

3.2

-

12.3

-

1

3.6

1

absolute linear encoder

10.1

A-110 PIglide linear motor stage with air bearing-Part Number-A-110.300A1

A-110.300A1

Available upon quote

0.5

0.1

85

39

3

20

1,000

39

300

85

×

1.24

Sin/cos, 1V peak to peak

20

4.88

Ironless 3-phase linear motor

±17.5

60

6.9

±17.5

48

3.2

hall effect

12.3

encoder index

1

3.6

1

incremental linear encoder

10.1

A-110 PIglide linear motor stage with air bearing-Part Number-A-110.300B1

A-110.300B1

Available upon quote

0.5

0.1

85

39

1.5

20

1,000

39

300

85

×

1.24

By SS-C

-

1

Ironless 3-phase linear motor

±17.5

60

6.9

±17.5

48

3.2

-

12.3

-

1

3.6

1

absolute linear encoder

10.1

A-110 PIglide linear motor stage with air bearing-Part Number-A-110.400A1

A-110.400A1

Available upon quote

0.5

0.1

85

39

4

20

1,000

39

400

85

×

1.24

Sin/cos, 1V peak to peak

20

4.88

Ironless 3-phase linear motor

±20

60

6.9

±20

48

3.2

hall effect

12.3

encoder index

1

3.6

1

incremental linear encoder

10.1

A-110 PIglide linear motor stage with air bearing-Part Number-A-110.400B1

A-110.400B1

Available upon quote

0.5

0.1

85

39

1.5

20

1,000

39

400

85

×

1.24

By SS-C

-

1

Ironless 3-phase linear motor

±20

60

6.9

±20

48

3.2

-

12.3

-

1

3.6

1

absolute linear encoder

10.1

Click on the part number for more information about each product

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About Company Handling This Product

Response Rate

100.0%


Response Time

26.5hrs

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