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  4. Vacuum related equipment Residual gas analyzer (quadrupole mass spectrometer) (XT series) (Kimball Physics Inc.)
Vacuum related equipment Residual gas analyzer (quadrupole mass spectrometer) (XT series)-Residual gas analyzer (XT series)
Vacuum related equipment Residual gas analyzer (quadrupole mass spectrometer) (XT series)-Kimball Physics Inc.

Vacuum related equipment Residual gas analyzer (quadrupole mass spectrometer) (XT series)
Kimball Physics Inc.

About This Product

■“Residual gas analyzer (XT series)” manufactured by Extorr

A high-performance, low-cost quadrupole mass spectrometer (RGA) equipped with a Pirani vacuum gauge and an ion vacuum gauge. There are three types: 100, 200, and 300 amu, and they are designed to be easily connected to any device. The built-in vacuum gauge measures pressure accurately and automatically adjusts and protects the measuring instrument.

■Features

・High performance/Low price ・Equipped with Pirani vacuum gauge and ion vacuum gauge ・Compact design ・Easy connection to PC, easy operation

■Applications

・Residual gas analysis ・Process monitor ・Impurity management

  • Product

    Vacuum related equipment Residual gas analyzer (quadrupole mass spectrometer) (XT series)

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1 Models of Vacuum related equipment Residual gas analyzer (quadrupole mass spectrometer) (XT series)

Image Part Number Price (excluding tax) Baking temperature (℃) Working pressure Operating temperature (℃) Resolution Sensitivity Connection flange Minimum detection partial pressure Detector Mass number range
Vacuum related equipment Residual gas analyzer (quadrupole mass spectrometer) (XT series)-Part Number-Residual gas analyzer (XT series)

Residual gas analyzer (XT series)

Available upon quote

350

Air to ultra-high vacuum (10-3 torr or less during gas residual analysis)

70

10% P.H.

5×10-4A/Torr

ICF70

5×10-14torr

Faraday cup, multiplier

1-100amu
1-200amu
1-300amu

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About Company Handling This Product

Kimball Physics Inc.

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