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  4. Vacuum related equipment Piezo valve PEV-1 (Kimball Physics Inc.)
Vacuum related equipment Piezo valve PEV-1-PEV-1
Vacuum related equipment Piezo valve PEV-1-Kimball Physics Inc.

Vacuum related equipment Piezo valve PEV-1
Kimball Physics Inc.

About This Product

■“PEV-1” manufactured by KEY HIGH VACUUM PRODUCTS

PEV-1, a gas flow valve using a piezoelectric element (piezo), can control gas flow rate accurately and quickly by supplying a voltage of 0 to 100V. It has a response time of 2ms and can use gases up to 50PSI. Gas leakage when closed is extremely low at 1 x 10-9 torr, making it ideal as a leak valve. Ideal for various gas process controls such as semiconductor manufacturing equipment, nuclear fusion chambers, ion research, plasma research, etc.

■Specifications

・Gas flow range: 0 to 500 SCCM ・Response speed: 2ms ・External leak rate: 1×10-9 torr ・Using voltage: 0 to 100VDC (10μA or less) ・Operating temperature range: +10~+60℃ ・Material: SUS ・Fitting: 1/4″Swagelok or 1/4″VCR ・Electrical input section: BNC ・Weight: 800g ・Others: "Closed" specification when not energized

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    Vacuum related equipment Piezo valve PEV-1

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1 Models of Vacuum related equipment Piezo valve PEV-1

Image Part Number Price (excluding tax)
Vacuum related equipment Piezo valve PEV-1-Part Number-PEV-1

PEV-1

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Kimball Physics Inc.

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Gas Valves　Kimball Physics Inc.
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