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Mobile load lock system-Mobile load lock system
Mobile load lock system-Epiquest Co., Ltd.

Mobile load lock system
Epiquest Co., Ltd.


About This Product

It is possible to transport samples between distant chambers while maintaining ultra-high vacuum. ◼︎Features ・A portable, lightweight vacuum device equipped with a small ion pump that can be powered by dry batteries. ・It is possible to take out and transport samples that are sensitive to atmospheric exposure. ・Ultra-high vacuum is maintained by dry battery drive even during transportation. (Actual 16 hours (no battery replacement)) - Equipped with a transfer port with a transfer rod and gate valve, allowing samples to be transferred between devices without exposure to the atmosphere. - Extremely compact and lightweight (approximately 30 kg) as a mobile load lock system with ion pump. ◼︎Specifications ・Combined mobile ion pump (pumping speed: 20L/sec) ・Stock chamber ・Sample size: Maximum 1 inch Φ ・Ultimate vacuum: ~10-8Pa ・Sample transport mechanism: Magnetic transfer rod *We can also design and manufacture products to suit your equipment. ・Manual gate valve (ICF70) ・Easy to carry transport case ・Stock mechanism that can store up to 2 samples (optional) ◼︎Applications ・For sample transport in ultra-high vacuum. ・For the best quality sample sharing between distant locations.

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    Mobile load lock system

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1 Models of Mobile load lock system

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Mobile load lock system-Part Number-Mobile load lock system

Mobile load lock system

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