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  4. Ultra-high temperature process furnace for SiC (Epiquest Co., Ltd.)
Ultra-high temperature process furnace for SiC-Ultra-high temperature process furnace for SiC
Ultra-high temperature process furnace for SiC-Epiquest Co., Ltd.

Ultra-high temperature process furnace for SiC
Epiquest Co., Ltd.

About This Product

■Features

・Supports up to 6 inches ・High temperature growth possible (MAX2,200℃) ・Rapid temperature rise possible (1,000℃→2,000℃ within 1 minute) ・Carbon free ・Ultra-high vacuum specifications (ultra-low leak rate) ・Full automation (process, transportation)

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    Ultra-high temperature process furnace for SiC

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1 Models of Ultra-high temperature process furnace for SiC

Image Part Number Price (excluding tax) Chamber configuration Ultimate pressure Soaking area Maximum heating temperature
Ultra-high temperature process furnace for SiC-Part Number-Ultra-high temperature process furnace for SiC

Ultra-high temperature process furnace for SiC

Available upon quote

2-chamber configuration (heating chamber, introduction chamber)

6.6×10^-7Pa

160mmΦ×65mmH

MAX2,200℃

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Epiquest Co., Ltd.

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