Oxidation equipment for surface-emitting laser production with real-time monitor HiVOX6001-HiVOX6001

Oxidation equipment for surface-emitting laser production with real-time monitor HiVOX6001
Epiquest Co., Ltd.

About This Product

This is a current confinement layer fabrication device, which is a key process for mass production of surface emitting lasers (VCSEL). This is a best-selling machine that has been on the market for over 15 years and has received high praise from many customers.

■Features・It is possible to observe oxidized samples inside the reactor in real time.
・Excellent oxidation performance (in-plane uniformity, reproducibility)
・Automatic operation (startup, shutdown, automatic oxidation mode)
・Expansion of transportation robot connections

Model
There is 1 model available for this product.

Product
Oxidation equipment for surface-emitting laser production with real-time monitor HiVOX6001

Handling Company
Epiquest Co., Ltd.

Free
Get started with our free quotation service - no cost, no obligation.

No Phone Required
We respect your privacy. You can receive quotes without sharing your phone number.

1 Models of Oxidation equipment for surface-emitting laser production with real-time monitor HiVOX6001

Image	Part Number	Price (excluding tax)	Control device	Raw material supply system	Board size	Substrate heating	Maximum heating temperature	Vacuum exhaust system	Oxidation performance (oxidation width)	Option
	HiVOX6001	Available upon quote	Sequence controller for interlock	Liquid mass flow controller type, thermal vaporizer (MAX.180℃)	Φ6 inch x 1 piece, Φ4 inch x 1 piece, Φ3 inch x 3 piece, Φ2 inch x 7 piece	Resistance heating method	600℃ (control thermocouple value)	Diaphragm pump	In-plane uniformity/10μm±0.4μm (excluding peripheral areas) Repeatability/10μm±0.4μm (run to run) *However, it depends on the characteristics of the AlAs epi layer.	Loader/unloader

Other products of Epiquest Co., Ltd.

Reviews shown here are reviews of companies.

MOCVD equipment horizontal reactor SH4001

Epiquest Co., Ltd.

60+ people viewing

Deposition Equipment

2 models listed

K-Cell Series High Temperature K Cell THKC-1900-H1

Epiquest Co., Ltd.

60+ people viewing

Last viewed: 22 hours ago

Microchamber MC-600

Epiquest Co., Ltd.

50+ people viewing

Heating Apparatus

2 models listed

MOCVD equipment horizontal reactor SH2003

Epiquest Co., Ltd.

60+ people viewing

Deposition Equipment

2 models listed

K-Cell series High temperature K cell for Si THKC-1000H1

Epiquest Co., Ltd.

50+ people viewing

Last viewed: 12 hours ago

RHEED RHP-307

Epiquest Co., Ltd.

50+ people viewing

MBE device for small research RC1100

Epiquest Co., Ltd.

190+ people viewing

Vacuum Vapor Deposition Devices

3 models listed

Liquid raw material supply MOCVD equipment for small research MPC1100V

Epiquest Co., Ltd.

50+ people viewing

Deposition Equipment

2 models listed

K-Cell series conversion shutter 114-70

Epiquest Co., Ltd.

50+ people viewing

Last viewed: 12 hours ago

Camera box for RHEED

Epiquest Co., Ltd.

40+ people viewing

MBE equipment for research RC2100

Epiquest Co., Ltd.

100+ people viewing

Last viewed: 23 hours ago

Vacuum Vapor Deposition Devices

3 models listed

Liquid raw material supply MOCVD equipment for research MPC2100H

Epiquest Co., Ltd.

50+ people viewing

Last viewed: 15 hours ago

Deposition Equipment

2 models listed

View more products of Epiquest Co., Ltd.

About Company Handling This Product

Epiquest Co., Ltd.

This is the version of our website addressed to speakers of English in the United States. If you are a resident of another country, please select the appropriate version of Metoree for your country in the drop-down menu.

Oxidation equipment for surface-emitting laser production with real-time monitor HiVOX6001 Epiquest Co., Ltd.

About This Product

■Features

1 Models of Oxidation equipment for surface-emitting laser production with real-time monitor HiVOX6001

HiVOX6001

Other products of Epiquest Co., Ltd.

About Company Handling This Product

Oxidation equipment for surface-emitting laser production with real-time monitor HiVOX6001
Epiquest Co., Ltd.