Oxidation device for surface emitting laser production VOX6001-VOX6001

Oxidation device for surface emitting laser production VOX6001
Epiquest Co., Ltd.

About This Product

This is a current confinement layer fabrication device, which is a key process for mass production of surface emitting lasers (VCSEL). This is a best-selling machine that has been on the market for over 15 years and has received high praise from many customers.

■Features・It is possible to observe oxidized samples inside the reactor in real time.
・Excellent oxidation performance (in-plane uniformity, reproducibility)
・Automatic operation (startup, shutdown, automatic oxidation mode)
・Expansion of transportation robot connections

Model
There is 1 model available for this product.

Product
Oxidation device for surface emitting laser production VOX6001

Handling Company
Epiquest Co., Ltd.

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1 Models of Oxidation device for surface emitting laser production VOX6001

Image	Part Number	Price (excluding tax)	Control device	Raw material supply system	Board size	Substrate heating	Maximum heating temperature	Vacuum exhaust system	Oxidation performance (oxidation width)	Option
	VOX6001	Available upon quote	Sequence controller for interlock	Liquid mass flow controller type, thermal vaporizer (MAX.180℃)	Φ6 inch x 1 piece, Φ4 inch x 1 piece, Φ3 inch x 3 piece, Φ2 inch x 7 piece	Resistance heating method	600℃ (control thermocouple value)	Diaphragm pump	In-plane uniformity/10μm±0.4μm (excluding peripheral areas) Repeatability/10μm±0.4μm (run to run) *However, it depends on the characteristics of the AlAs epi layer.	Loader/unloader

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About Company Handling This Product

Epiquest Co., Ltd.

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Oxidation device for surface emitting laser production VOX6001 Epiquest Co., Ltd.

About This Product

■Features

1 Models of Oxidation device for surface emitting laser production VOX6001

VOX6001

Other products of Epiquest Co., Ltd.

About Company Handling This Product

Oxidation device for surface emitting laser production VOX6001
Epiquest Co., Ltd.