This product is registered by Panasonic Industry Co., Ltd..
About This Product
■``You can't make things that you can't measure.'' UA3P supports nano-accuracy manufacturing through various microscopic shape measurements.
Measures aspherical lenses, free-form mirrors, and their molds that are essential for digital home appliances such as smartphones, DSCs, DVDs, and Blu-rays, home security, optical communications, and automotive HUDs with an accuracy of up to 0.01 μm. Easy operation and quick feedback on machining.
■Measurement range of ultra-high precision 3D measuring machine UA3P series
・Full lineup from ultra-high precision measurement of ±0.10 μm at a tilt angle of 70 degrees to measurement of large parts of □500 mm
・Measurement targets: Mobile lenses, lens barrels, DSLR lenses, fθ lenses, X-ray telephoto mirrors, lens molds, camera lenses, toric lens molds, stepper lenses
Technology that enables ultra-high precision measurements
■Coordinate measurement technology
The coordinate system of the measuring machine consists of a stage and three independent reference planes (mirrors), and uses laser interferometry using a frequency-stabilized He-Ne laser as a light source to measure the length in each of the X, Y, and Z axes at a resolution of 0.3 nm. This suppresses the effects of the stage's perpendicularity and straightness, achieving high-precision measurements.
■Top surface measurement probe/AFP
- Highly accurate scanning measurement of the object to be measured is possible with ultra-low measuring force. The stylus is held by a micro air slider, and a focusing laser detects the movement of the stylus, and the AFP position follows the shape of the object to maintain a constant measurement force.
■Side measurement probe/S-AFP
・The inclination of the probe mirror detected with high accuracy is fed back to the XY stage, allowing scan measurement with low contact force (0.3 mN). It is possible to measure resin products such as lens barrels without deformation.
・Measuring force: 0.3 mN (30 mgf)
・Measurement accuracy: ±0.15 μm (when measuring 90° inclination)
・Maximum measurement angle: 45° to 90° (angle with respect to the horizontal plane) when measuring in the horizontal direction, 80° to 90° (angle with respect to the horizontal plane) when measuring in the vertical direction
■Software
Achieves high-speed, high-precision measurement with simple operation. It can handle any design information, and can three-dimensionally correct installation errors of the object to be measured, allowing for accurate shape measurement.
■Top side evaluation technology
By combining top surface measurement data and side surface measurement data, it is possible to evaluate the eccentricity and inclination of the optical axis of lenses and molds based on the side surface.
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Product
FA Measurement/Measurement System Ultra-high precision three-dimensional measuring machine UA3P series
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