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  4. FA semiconductor related system Plasma dicer APX300-PD (Panasonic Industry Co., Ltd.)
FA semiconductor related system Plasma dicer APX300-PD-APX300-PD
FA semiconductor related system Plasma dicer APX300-PD-Panasonic Industry Co., Ltd.

FA semiconductor related system Plasma dicer APX300-PD
Panasonic Industry Co., Ltd.

About This Product

■APX300-PD is a multi-chamber system that realizes automation and high productivity in semiconductor factories. Panasonic's unique chamber has been further evolved to achieve high-speed, highly uniform dicing. We contribute to clean processing, which is important for the production of cutting-edge semiconductors, which are becoming increasingly advanced.

・Continuous processing of different materials is possible in the same chamber (Si + insulation film*) ・Achieves high uniformity by controlling plasma density distribution ・Achieve high-speed machining without damage (Si: Etching rate　≧35um/min SiO2: Etching rate　≧0.5um/min) ・Achieves clean processing due to particle-free ・Multi-chamber system (up to 4 chambers) compatible with semiconductor factories ・Compatible with 300mm wafers and wafers with 300mm rings

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    FA semiconductor related system Plasma dicer APX300-PD

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1 Models of FA semiconductor related system Plasma dicer APX300-PD

Image Part Number Price (excluding tax)
FA semiconductor related system Plasma dicer APX300-PD-Part Number-APX300-PD

APX300-PD

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Panasonic Industry Co., Ltd.

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Plasma Cutting Machinery
Plasma Cutting Machinery　Panasonic Industry Co., Ltd.
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