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  4. FA semiconductor related system plasma dicer APX300-DM (Panasonic Industry Co., Ltd.)
FA semiconductor related system plasma dicer APX300-DM-APX300-DM
FA semiconductor related system plasma dicer APX300-DM-Panasonic Industry Co., Ltd.

FA semiconductor related system plasma dicer APX300-DM
Panasonic Industry Co., Ltd.

About This Product

■APX300-DM uses a chemical reaction process using plasma, and offers clean processing without the mechanical dust, debris, vibration, and water pressure caused by existing blades.

・Single chamber configuration allows for a wide range of applications from research and development to mass production ・Continuous processing of different materials is possible in the same chamber (Si + insulation film*) ・Supports wafer with 200mm ring/wafer with 300mm ring frame *SiO2, SiN, etc.

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    FA semiconductor related system plasma dicer APX300-DM

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1 Models of FA semiconductor related system plasma dicer APX300-DM

Image Part Number Price (excluding tax)
FA semiconductor related system plasma dicer APX300-DM-Part Number-APX300-DM

APX300-DM

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Panasonic Industry Co., Ltd.

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Plasma Cutting Machinery
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