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FA semiconductor related system plasma cleaner PSX307A-PSX307A
FA semiconductor related system plasma cleaner PSX307A-Panasonic Industry Co., Ltd.

FA semiconductor related system plasma cleaner PSX307A
Panasonic Industry Co., Ltd.


About This Product

PSX307A is a parallel plate type plasma cleaner for substrates with automatic transfer. You can choose between a loader/unloader and an inline version.The wafer version supports up to φ300 mm wafers (with or without a ring), and the substrate version can process four 77.5 mm wide substrates at the same time.

■Features (common to PSX307 series)

・Chamber configuration that achieves both in-plane uniformity and etching rate ・Using a unique lifting unit, it can handle thin boards with warpage and boards with components on the back side. ・Avoid abnormal discharge and achieve damage-free processing using our unique plasma monitor function ・Ensure traceability by going online

■Application examples

・Improved bonding performance for wire bonding, flip chip, and bonding ・Improved adhesion of mold and underfill ・Removal of resin residue on bumps after wafer molding (wafer specification) ・Desmear/descum processing (wafer specification)

■Application example (wafer level package)

・Wafer surface modification before die attach: Improving die attach force ・Bump cleaning before flip mounting: Improving the reliability of metal bonding ・Removal of mold resin residue on wafer bumps: Improving the quality of CSP solder bumps ・Removal of resin residue inside via holes (desmear): Improving the quality of via hole pads

■Application example (base level)

・Au wire bonding: Improved bonding reliability ・Cu wire bonding: Fluorine residue removal ・Mold sealing resin: Improved resin/resist adhesion ・Ultrasonic flip bonding: Improving bump bonding quality ・LED wire bonding: Siloxane contamination removal ・Underfill: Improved adhesion and productivity

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    FA semiconductor related system plasma cleaner PSX307A

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1 Models of FA semiconductor related system plasma cleaner PSX307A

Image Part Number Price (excluding tax)
FA semiconductor related system plasma cleaner PSX307A-Part Number-PSX307A

PSX307A

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