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  4. FA Semiconductor related system Plasma cleaner PSX307/PSX307-HSA (Panasonic Industry Co., Ltd.)
FA Semiconductor related system Plasma cleaner PSX307/PSX307-HSA-PSX307
FA Semiconductor related system Plasma cleaner PSX307/PSX307-HSA-Panasonic Industry Co., Ltd.

FA Semiconductor related system Plasma cleaner PSX307/PSX307-HSA
Panasonic Industry Co., Ltd.

About This Product

■PSX307 is a parallel plate type plasma cleaner for substrates with automatic transfer. You can choose between a model with a loader/unloader and an inline version, and the following two models can be selected depending on the board dimensions.

・S type board dimensions: L 50 mm × W 20 mm to L 250 mm × W 75 mm ・M type board dimensions: L 50 mm × W 20 mm to L 330 mm × W 120 mm

■Features (common to PSX307 series)

・Chamber configuration that achieves both in-plane uniformity and etching rate ・Using a unique lifting unit, it can handle thin boards with warpage and boards with components on the back side. ・Avoid abnormal discharge and achieve damage-free processing using our unique plasma monitor function ・Ensure traceability by going online

■Application examples

・Improved bonding performance for wire bonding, flip chip, and bonding ・Improved adhesion of mold and underfill

■Application example (base level)

・Au wire bonding: Improved bonding reliability ・Cu wire bonding: Fluorine residue removal ・Mold sealing resin: Improved resin/resist adhesion ・Ultrasonic flip bonding: Improving bump bonding quality ・LED wire bonding: Siloxane contamination removal ・Underfill: Improved adhesion and productivity Maintenance support application (PSX307-HSA)

■Visualizes the equipment status of plasma cleaner (PSX307) and supports predictive maintenance

・Score changes in equipment status and perform maintenance at the optimal time ・It is possible to check the status of up to 100 units and perform planned operations. ・Applicable to existing plasma cleaner (PSX307). No special modifications required

  • Product

    FA Semiconductor related system Plasma cleaner PSX307/PSX307-HSA

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1 Models of FA Semiconductor related system Plasma cleaner PSX307/PSX307-HSA

Image Part Number Price (excluding tax)
FA Semiconductor related system Plasma cleaner PSX307/PSX307-HSA-Part Number-PSX307

PSX307

Available upon quote

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Panasonic Industry Co., Ltd.

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