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FA sensor Special purpose sensor LED type wafer alignment sensor HD-T1-HD-T1030
FA sensor Special purpose sensor LED type wafer alignment sensor HD-T1-Panasonic Industry Co., Ltd.

FA sensor Special purpose sensor LED type wafer alignment sensor HD-T1
Panasonic Industry Co., Ltd.


About This Product

basic information

■Highly accurate detection of 30μm achieved with safe LED light

CE and UKCA certified. Features

■No safety measures required

The wafer alignment sensor HD-T1 series uses a safe red LED as the light source, so there is no need for any complicated safety measures. There is no need to obtain the protective cover required when using a laser beam or the FDA regulations required when using it in the United States.

■Easy construction

The connection between the sensor head and controller is a one-touch connector type. Wiring effort is minimal and maintenance is easy.

■Low current consumption 70mA or less

Current consumption is less than 70mA for sensor head and controller. Achieves low power consumption comparable to photoelectric sensors.

■High resolution 30μm

Although the wafer alignment sensor HD-T1 series uses a red LED light source, it achieves high performance comparable to that of a laser sensor, enabling highly accurate detection.

■No need for optical axis adjustment

Since the emitter and receiver are integrated, there is no need for troublesome optical axis adjustment. In addition, the detection distance and detection width are 30 mm, which covers a wide area, making it possible to handle wafers of various sizes.

■Equipped with span and shift adjustment functions

In addition to the span adjustment function, the analog output (1 to 5V) is equipped with a convenient shift adjustment function that allows you to shift the analog voltage within a range of ±0.5V.

■Applications

Wafer eccentricity/notch detection

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    FA sensor Special purpose sensor LED type wafer alignment sensor HD-T1

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1 Models of FA sensor Special purpose sensor LED type wafer alignment sensor HD-T1

Image Part Number Price (excluding tax) Cable Photodetector Light emitting element Material Detection width Detection distance Combination controller Environmental resistance Operating ambient temperature Environmental resistance Ambient humidity Environmental resistance Ambient illuminance Environmental resistance Protective structure Environmental resistance Insulation resistance Environmental resistance Vibration resistance Environmental resistance Impact resistance Environmental resistance Voltage resistance Mass
FA sensor Special purpose sensor LED type wafer alignment sensor HD-T1-Part Number-HD-T1030

HD-T1030

Available upon quote

Heat-resistant PVC cable with 0.5m terminal connector

Photodiode

Red LED (emission peak wavelength: 650nm)

Main body case: PEI, front cover: glass, mounting base: aluminum

30mm (Straightness is defined at 28mm width)

30mm (fixed)

HD-T1C

0~+40℃ (no condensation), storage: -20~+55℃

35~85%RH, during storage: 35~85%RH

Incandescent lamp: Light receiving surface illuminance 3,000 lx or less, Fluorescent lamp light: Light receiving surface illuminance 3,000 lx or less

IP40 (IEC)

20MΩ or more at DC250V megger, between all charging parts and case

Durability 10~150Hz Double amplitude 0.75mm 2 hours each in XYZ directions

Durability 490m/s2 (approx. 50G) 3 times in each direction of XYZ

AC1,000V for 1 minute, all live parts and between cases

Body mass: Approx. 150g

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