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Piezo motor stage control control-LC421A
Piezo motor stage control control-THK PRECISION CO.,LTD.

Piezo motor stage control control
THK PRECISION CO.,LTD.


About This Product

This is a high-precision stage that can control the positioning of strokes from several mm to several tens of mm with a high resolution of 20 to 40 nm. This stage uses PiezoMotor's PiezoLEGS® actuator as the actuator. There are 6N and 20N types of actuator thrust, which maintains a holding force that is almost the same as the thrust even when stationary, and maintains stability when stationary and high position accuracy against disturbances. Aluminum and SUS models are available for the main body material.

■Features

・Slim and space saving ・Less self-heating ・Suitable for vacuum environment, non-magnetic ・High position repeatability with built-in linear encoder

■Product application examples

・High-precision positioning of optical system ・Laser alignment ・Precision mapping measurement ・X-ray/analysis, measurement equipment ・Microscope sample stage ・Applications for holding stationary after position adjustment

■Product information

This is a controller for driving and controlling the LS type piezo motor stage. The control circuit and driver are integrated, and by connecting a piezo motor stage, closed control can be performed using an optical linear encoder with ABZ phase output. We offer 1 to 4 axis controllers based on 2 axis controllers and 4 axis controllers. Control can be easily performed by sending control commands from a PC via LAN or RS485 interface. It also supports changes to the RS232C interface.

■Others

・Built-in control board, driver board, linear sensor interpolator, internal chain connection via RS485, support for multiple axes (varies depending on the linear sensor) ・High-resolution positioning control can be performed immediately by connecting to a 1-4 axis controller compatible with the stage. - Drive control using a linear sensor with a resolution of 10 nm and a driver with a drive resolution of 1 nm or less. - Since the drive resolution is 1 nm or less, it can also be used with non-standard linear sensors with higher precision. - The internal control board is connected by a chain connection using RS485, so it can support multiple axes (up to 127 axes).

  • Product

    Piezo motor stage control control

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1 Models of Piezo motor stage control control

Image Part Number Price (excluding tax) Motor drive resolution Control interface Number of control axes External dimensions Connection linear scale Maximum drive frequency Power supply Drive driver output
Piezo motor stage control control-Part Number-LC421A

LC421A

Available upon quote

・8,192 microsteps (1 microstep ≒ 0.5nm): 1Wfm (1 cycle of drive waveform) is divided into 8,192 and driven.
・Moves 4~5μm by 1Wfm

・Standard LAN.RS485 (sold separately) RS485-USB conversion cable
・Changing selection RS232C After changing, LAN and RS485 cannot be used.

1

W210×D240×H68mm Does not include protrusions

・Type Type A
・Manufacturer: Renishaw

・1,500Hz (6N stage) .750Hz (20N stage): Maximum frequency of 1Wfm
・The product of the drive frequency and the amount of movement of 1Wfm is the maximum speed.

AC100~120V/AC200~240V switchable

0~45V

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About Company Handling This Product

Company Overview

THK PRECISION CO., LTD., established in 2002 and based in Tokyo, Japan, is a manufacturer of positioning devic...

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  • Japan

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