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Piezo motor stage Rotating system Goniometer stage-LS1GU90-02A-20
Piezo motor stage Rotating system Goniometer stage-THK PRECISION CO.,LTD.

Piezo motor stage Rotating system Goniometer stage
THK PRECISION CO.,LTD.


About This Product

This is a high-precision stage that can control the positioning of strokes from several mm to several tens of mm with a high resolution of 20 to 40 nm. This stage uses PiezoMotor's PiezoLEGS® actuator as the actuator. There are 6N and 20N types of actuator thrust, which maintains a holding force that is almost the same as the thrust even when stationary, and maintains stability when stationary and high position accuracy against disturbances. Aluminum and SUS models are available for the main body material.

■Features

・Slim and space saving ・Less self-heating ・Suitable for vacuum environment, non-magnetic ・High position repeatability with built-in linear encoder

■Product application examples

・High-precision positioning of optical system ・Laser alignment ・Precision mapping measurement ・X-ray/analysis, measurement equipment ・Microscope sample stage ・Applications for holding stationary after position adjustment

  • Product

    Piezo motor stage Rotating system Goniometer stage

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1 Models of Piezo motor stage Rotating system Goniometer stage

Image Part Number Price (excluding tax) Built-in optical linear scale Resolution Range of motion Thrust Maximum movement speed Main body Moving guide Repeated positioning accuracy Load capacity Static holding force
Piezo motor stage Rotating system Goniometer stage-Part Number-LS1GU90-02A-20

LS1GU90-02A-20

Available upon quote

・Type Type A Manufactured by Renishaw
・Scale division number 20μm/2,000 divisions. (10nm)

0.1" seconds

±1° Full range 2°

20N

3.6°/sec

・Weight 650g
・Material Aluminum
・Surface treatment Electroless nickel plating

Cross roller guide

±0.1" seconds

2kg

20N

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About Company Handling This Product

Company Overview

THK PRECISION CO., LTD., established in 2002 and based in Tokyo, Japan, is a manufacturer of positioning devic...

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  • Japan

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