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  4. Piezo motor stage Linear system Z-axis stage (THK PRECISION CO.,LTD.)
Piezo motor stage Linear system Z-axis stage-LSVL90-12A-20
Piezo motor stage Linear system Z-axis stage-THK PRECISION CO.,LTD.

Piezo motor stage Linear system Z-axis stage
THK PRECISION CO.,LTD.

About This Product

This is a high-precision stage that can control the positioning of strokes from several mm to several tens of mm with a high resolution of 20 to 40 nm. This stage uses PiezoMotor's PiezoLEGS® actuator as the actuator. There are 6N and 20N types of actuator thrust, which maintains a holding force that is almost the same as the thrust even when stationary, and maintains stability when stationary and high position accuracy against disturbances. Aluminum and SUS models are available for the main body material.

■Features

・Slim and space saving ・Less self-heating ・Suitable for vacuum environment, non-magnetic ・High position repeatability with built-in linear encoder

■Product application examples

・High-precision positioning of optical system ・Laser alignment ・Precision mapping measurement ・X-ray/analysis, measurement equipment ・Microscope sample stage ・Applications for holding stationary after position adjustment

  • Product

    Piezo motor stage Linear system Z-axis stage

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1 Models of Piezo motor stage Linear system Z-axis stage

Image Part Number Price (excluding tax) Pitching Yawing Rolling Built-in optical linear scale Resolution Range of motion Thrust Maximum movement speed Main body Moving guide Repeated positioning accuracy Load capacity Static holding force
Piezo motor stage Linear system Z-axis stage-Part Number-LSVL90-12A-20

LSVL90-12A-20

Available upon quote

15"/15"/15

・Type Type A Manufactured by Renishaw
・Scale division number 20μm/2,000 divisions. (10nm)

20nm

±6mm total range 12mm

20N

5mm/sec

・Weight 900g
・Material Aluminum
・Surface treatment Electroless nickel plating

Cross roller guide

±20nm

0.5kg

20N

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About Company Handling This Product

THK PRECISION CO.,LTD.

Company Overview

THK PRECISION CO., LTD., established in 2002 and based in Tokyo, Japan, is a manufacturer of positioning devic...

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  • Japan

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