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Piezo stage for ultra-precision processing machines, 2-axis typeHandling Company
THK PRECISION CO.,LTD.Categories
Image | Part Number | Price (excluding tax) | Stroke | Pitching Yawing Rolling | Linearity | Resonant frequency | Built-in displacement sensor | Resolution | Rigidity | Piezoelectric capacitance | Main body | Repeated positioning accuracy | Load capacity |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|
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PU2H70F-030U |
Available upon quote |
・When closed (X,Y) 30μm |
1"/1"/1 |
0.10% |
・1,800Hz at 0g load |
Capacitive displacement sensor |
(X,Y) 1nm |
(X,Y) 0.04μm/N |
3.4μF/axis |
・Weight 1,500g |
(X,Y) ±1nm |
50N |
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Reviews shown here are reviews of companies.