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Piezo stage vertical type-PFVC**-100U
Piezo stage vertical type-THK PRECISION CO.,LTD.

Piezo stage vertical type
THK PRECISION CO.,LTD.

About This Product

This is a piezo stage specially designed for adjusting the focus of objective lenses. By incorporating it into microscopes and various inspection, measurement, and observation equipment, it is possible to speed up and increase the precision of lens focus adjustment.

■Objective lenses from each manufacturer can be attached.

- You can choose from 4 different thread sizes to match the lens thread diameter of each manufacturer. ・A “thread diameter conversion adapter” is also available as an option. ・Please contact us regarding installation of non-standard lenses. 4 types to choose from

■Horizontal type

It has a structure that reduces the thickness of the main body. Choose from this type if you require a wide range of stroke variations and a long travel distance.

■Vertical type

This type has high rigidity and emphasizes responsiveness. Suitable when using heavy lenses, lenses with long barrels, or when high-speed focusing is required.

■Box type

It has a symmetrical double-sided structure centered on the objective lens, allowing stable focusing even with heavy lenses. It can be securely installed and fixed with four screws, making it suitable for integration into manufacturing equipment and inspection equipment.

■For lens barrel

You can attach the microscope lens barrel to make fine adjustments in the focus direction.

■Product application examples

・High-speed focus ・Image processing equipment ・Confocal microscope ・Laser processing ・Semiconductor, FPD equipment ・Interferometer shape measurement

  • Product

    Piezo stage vertical type

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1 Models of Piezo stage vertical type

Image Part Number Price (excluding tax) Stroke Pitching Yawing Rolling Linearity Resonant frequency Built-in displacement sensor Resolution Rigidity Nominal diameter Piezoelectric capacitance Main body Repeated positioning accuracy
Piezo stage vertical type-Part Number-PFVC**-100U

PFVC**-100U

Available upon quote

・100μm when closed
・120μm when open

1"/3"/1

0.10%

・1,000Hz at 0g load
・470Hz at 120g load

Capacitive displacement sensor

2nm

0.72μm/N

Small diameter

6.8μF

・Weight 250g
・Material Aluminum
・Surface treatment: black alumite

±2nm

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About Company Handling This Product

THK PRECISION CO.,LTD.

Company Overview

THK PRECISION CO., LTD., established in 2002 and based in Tokyo, Japan, is a manufacturer of positioning devic...

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  • Japan

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Piezo Stages　THK PRECISION CO.,LTD.
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