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Piezo stage tilt (+Z) type-PT3V80F-400S
Piezo stage tilt (+Z) type-THK PRECISION CO.,LTD.

Piezo stage tilt (+Z) type
THK PRECISION CO.,LTD.

About This Product

Rotation and angle adjustment can be performed using piezo drive. Although the amount of angular displacement is small, it has excellent high-speed vibration and angular resolution, making it ideal for micro-angle alignment of optical devices and precision surface matching.

■Rotation guidance by elastic hinge mechanism

A uniquely designed elastic hinge mechanism expands the slight expansion and contraction of the piezo element and supports stable rotational movement. Since there is no friction and wear, it has excellent smooth and high-speed movement, making it suitable for fine angle adjustment.

■Product application examples

・Laser optical axis adjustment ・Precision parallel surface alignment ・Optical device minute angle adjustment ・Tilt adjustment ・Cavity length adjustment

  • Product

    Piezo stage tilt (+Z) type

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1 Models of Piezo stage tilt (+Z) type

Image Part Number Price (excluding tax) Linearity Resonant frequency Built-in displacement sensor Resolution Rigidity Piezoelectric capacitance Folding positioning accuracy Maximum tilt angle movement Main body Load capacity
Piezo stage tilt (+Z) type-Part Number-PT3V80F-400S

PT3V80F-400S

Available upon quote

0.20%

・270Hz at 0g load
・230Hz at 100g load

Capacitive displacement sensor

・Tilt 0.02" seconds≒0.10μrad
・Lifting 2nm

・Tilt (θx, θy) 390" seconds, 320" seconds/Nm
・Lifting (Z) 1.0μm/N

2.8μF

・Tilt ±0.02" seconds ≒ ±0.10μrad
・Elevation ±2nm

・Tilt ±400" seconds ≒ 0.11° ≒ 1.9mrad
・Lifting 100μm

・Weight 1,200g
・Material steel
・Surface treatment Electroless nickel plating

10N

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About Company Handling This Product

THK PRECISION CO.,LTD.

Company Overview

THK PRECISION CO., LTD., established in 2002 and based in Tokyo, Japan, is a manufacturer of positioning devic...

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  • Japan

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