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  4. Piezo stage XYZ axis aperture model (THK PRECISION CO.,LTD.)
Piezo stage XYZ axis aperture model-PK3H130-030UA
Piezo stage XYZ axis aperture model-THK PRECISION CO.,LTD.

Piezo stage XYZ axis aperture model
THK PRECISION CO.,LTD.

About This Product

This is a lineup that has an opening (transmission hole) in the center of the movable table. Suitable for laser transmission, microscopic observation in combination with microscopes and analytical instruments, and high-precision mapping measurements.

■From compact to large opening

We have a wide range of types, from compact aperture types suitable for small devices to wide-opening types that can align large panel boards.

■Smooth and accurate scanning

High-precision feedback control enables highly reliable operation according to command signals.

■Product application examples

・Scanning probe microscope ・Microscope sample table ・Spectral analysis equipment ・Semiconductor, FPD related equipment ・Exposure equipment ・Mapping measurement

  • Product

    Piezo stage XYZ axis aperture model

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1 Models of Piezo stage XYZ axis aperture model

Image Part Number Price (excluding tax) Stroke Pitching Yawing Rolling Linearity Resonant frequency Built-in displacement sensor Resolution Rigidity Piezoelectric capacitance Main body Repeated positioning accuracy Load capacity
Piezo stage XYZ axis aperture model-Part Number-PK3H130-030UA

PK3H130-030UA

Available upon quote

・When closed (X,Y) 30μm (Z) 20μm
・When open (X,Y) 40μm (Z) 25μm

2"/2"/2

0.10%

・820Hz at 0g load
・680Hz at 100g load

Capacitive displacement sensor

(X,Y,Z) 1nm

(X,Y) 0.08, (Z) 0.19μm/N

(X,Y) 6.8, (Z) 4.3μF

・Weight 1,100g
・Material aluminum + copper
・Surface treatment: black alumite + electroless nickel plating

(X,Y,Z) ±1nm

10N

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About Company Handling This Product

THK PRECISION CO.,LTD.

Company Overview

THK PRECISION CO., LTD., established in 2002 and based in Tokyo, Japan, is a manufacturer of positioning devic...

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  • Japan

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