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  4. Piezo stage XYZ axis high durability model (THK PRECISION CO.,LTD.)
Piezo stage XYZ axis high durability model-PSM3L160-100U
Piezo stage XYZ axis high durability model-THK PRECISION CO.,LTD.

Piezo stage XYZ axis high durability model
THK PRECISION CO.,LTD.

About This Product

Basic series of piezo stages with a wide range of strokes from 1-axis to 3-axis integrated types

■Performance classification using two mechanisms

It is classified into "direct drive mechanism" which has high resonance frequency and emphasizes high-speed response, and "displacement magnification mechanism" which ensures stroke.

■Direct drive mechanism

- A mechanism in which the piezoelectric element directly moves the moving table. - Excellent resolution and responsiveness by suppressing the stroke. ・High rigidity allows stable positioning even under heavy loads.

■Displacement magnification mechanism

- Equipped with a mechanism that mechanically amplifies the expansion of the piezoelectric element. ・Depending on the magnification ratio, you can obtain a stroke that is several times to more than ten times that of direct drive. ・Position repeatability is maintained through feedback control using the built-in displacement sensor.

■Product application examples

・Semiconductor, FPD inspection equipment ・HDD tester ・Laser optical system alignment ・Interference equipment ・Analytical equipment ・Nanometer positioning

  • Product

    Piezo stage XYZ axis high durability model

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1 Models of Piezo stage XYZ axis high durability model

Image Part Number Price (excluding tax) Stroke Pitching Yawing Rolling Linearity Resonant frequency Built-in displacement sensor Resolution Rigidity Piezoelectric capacitance Main body Repeated positioning accuracy Load capacity
Piezo stage XYZ axis high durability model-Part Number-PSM3L160-100U

PSM3L160-100U

Available upon quote

・100μm when closed
・130μm when open

3"/2"/2

0.10%

・220Hz at 0g load
・210Hz at 100g load

Capacitive displacement sensor

2nm

・(X)0.69μm/N
・(Y) 0.32μm/N
・(Z) 1.02μm/N

12.8μF/axis

・Mass 11.6kg
・Material Aluminum alloy, stainless steel
・Surface treatment Black alumite, electroless nickel plating

±2nm

10N

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About Company Handling This Product

THK PRECISION CO.,LTD.

Company Overview

THK PRECISION CO., LTD., established in 2002 and based in Tokyo, Japan, is a manufacturer of positioning devic...

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  • Japan

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