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  4. Piezo stage XYZ axis standard model (THK PRECISION CO.,LTD.)
Piezo stage XYZ axis standard model-PS3H70-020UA
Piezo stage XYZ axis standard model-THK PRECISION CO.,LTD.

Piezo stage XYZ axis standard model
THK PRECISION CO.,LTD.

About This Product

Basic series of piezo stages with a wide range of strokes from 1-axis to 3-axis integrated types

■Performance classification using two mechanisms

It is classified into "direct drive mechanism" which has high resonance frequency and emphasizes high-speed response, and "displacement magnification mechanism" which ensures stroke.

■Direct drive mechanism

- A mechanism in which the piezoelectric element directly moves the moving table. - Excellent resolution and responsiveness by suppressing the stroke. ・High rigidity allows stable positioning even under heavy loads.

■Displacement magnification mechanism

- Equipped with a mechanism that mechanically amplifies the expansion of the piezoelectric element. ・Depending on the magnification ratio, you can obtain a stroke that is several times to more than ten times that of direct drive. ・Position repeatability is maintained through feedback control using the built-in displacement sensor.

■Product application examples

・Semiconductor, FPD inspection equipment ・HDD tester ・Laser optical system alignment ・Interference equipment ・Analytical equipment ・Nanometer positioning

  • Product

    Piezo stage XYZ axis standard model

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1 Models of Piezo stage XYZ axis standard model

Image Part Number Price (excluding tax) Stroke Pitching Yawing Rolling Linearity Resonant frequency Built-in displacement sensor Resolution Rigidity Piezoelectric capacitance Main body Repeated positioning accuracy Load capacity
Piezo stage XYZ axis standard model-Part Number-PS3H70-020UA

PS3H70-020UA

Available upon quote

・When closed (X,Y) 20μm (Z) 12μm
・When open (X,Y) 22μm (Z) 15μm

1"/1"/1

0.10%

・970Hz at 0g load
・770Hz at 100g load

Capacitive displacement sensor

(X,Y,Z) 1nm

(X,Y) 0.2, (Z) 0.1μm/N

(X,Y) 2.15, (Z) 5.4μF

・Weight 1,700g
・Material copper
・Surface treatment Electroless nickel plating

(X,Y,Z) ±1nm

10N

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About Company Handling This Product

THK PRECISION CO.,LTD.

Company Overview

THK PRECISION CO., LTD., established in 2002 and based in Tokyo, Japan, is a manufacturer of positioning devic...

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  • Japan

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